0200-09553 — Electrostatic Chuck, 200mm (Applied Materials)

Name: 0200-09553 — Electrostatic Chuck, 200mm (Applied Materials)
Brand: Applied Materials
SKU: 0200-09553

Part No. 0200-09553

Market Price

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Available by Request

Last verified: 2026-05-16

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for 0200-09553 — Electrostatic Chuck, 200mm (Applied Materials) moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used 0200-09553 — Electrostatic Chuck, 200mm (Applied Materials) cost in 2026?

Pricing for used 0200-09553 — Electrostatic Chuck, 200mm (Applied Materials) units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Applied Materials Parts & Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used 0200-09553 — Electrostatic Chuck, 200mm (Applied Materials) from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

0200-09553 Specifications and Compatible Tools

Key specs: 10 kV DC voltage, 13.56 MHz RF frequency, 500 W max power, and 200 sccm gas flow rate. Compatible with AMAT Centura 5500 systems (2002–2008 production). Verify the 0200-09554 variant has a different electrode geometry and is not interchangeable. Avoid using this chuck in non-Centura tools without validating the vacuum interface (part number 0200-09553A). Dielectric material is aluminum nitride, rated for 400°C operation.

What to Check Before Buying a Used 0200-09553 in 2026

Electrode coating thickness: Use a profilometer to measure dielectric layer. Reject if <150 microns or >300 microns (spec: 200±50 microns).
Dielectric breakdown test: Apply 12 kV AC with a HiPot tester. Must pass 1 minute without arcing.
Gas port flow rate: Test with a rotameter. Accept only 190–210 sccm at 5 psi (spec: 200±5 sccm).
RF cycle count: Units with >60,000 cycles (2026 industry average is 45,000) risk electrode delamination.
Vacuum integrity: Use a leak detector to confirm <1×10⁻⁸ mbar·L/s. Failures above 5×10⁻⁸ indicate seal degradation.

Q: Is 0200-09553 better than 0200-09554 for Centura systems?
A: No. The 0200-09554 uses a different electrode footprint. Verify tool-specific part numbers in AMAT’s EPG-2002 manual.

Q: What’s the lead time for a Grade B unit in 2026?
A: 2–4 weeks after sourcing confirmation. Grade A units take 6–8 weeks due to refurbishment.

Q: How does 2026 pricing compare to 2025?
A: Prices dropped 12% YoY in 2026 due to increased supply from decommissioned systems.

Q: Can I use this chuck for 300mm wafers with modifications?
A: No. The 200mm chuck lacks the thermal management and electrode scaling required for 300mm.