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Applied Materials

Applied Materials 0200-09564 Focus Ring (300mm DPS II Etch) - Replacement & Failure Guide

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Applied Materials

Applied Materials 0200-09564 Focus Ring (300mm DPS II Etch) - Replacement & Failure Guide

Name: Applied Materials 0200-09564 Focus Ring (300mm DPS II Etch) - Replacement & Failure Guide
Brand: Applied Materials
SKU: 0200-09564
Availability: InStock

Part No. 0200-09564

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✓Documentation included

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✓30-day functional warranty

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How much does a used Applied Materials 0200-09564 Focus Ring (300mm DPS II Etch) - Replacement & Failure Guide cost in 2026?

Pricing for used Applied Materials 0200-09564 Focus Ring (300mm DPS II Etch) - Replacement & Failure Guide units varies by condition and configuration. Contact us for current 2026 market pricing — typical savings vs. new OEM are 40–70%. Get a quote.

Used Applied Materials Process Kit vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 40–70% vs. new OEM

✓Lead time: 2–6 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Applied Materials 0200-09564 Focus Ring (300mm DPS II Etch) - Replacement & Failure Guide from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2–6 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does Applied Materials 0200-09564 Cost in 2026?

Used 0200-09564 focus rings range from $4,200–$6,800 in 2026, depending on erosion depth and surface integrity. Refurbished units (with silicon recontouring and RF coating) cost $8,500–$10,200, saving 42–58% vs. new parts (which exceed $15,000). Caveat: Units with >0.3mm surface erosion require silicon rework, adding $1,200–$1,800 to used pricing. Always verify the part’s lifecycle history—rings from tools with >150k wafer starts often show accelerated edge wear.

0200-09564 Specifications and Compatible Tools

This silicon focus ring operates at 13.56MHz RF, 300–400°C process temps, and handles up to 5kW forward power. Key spec: max allowable erosion of 0.7mm (measured via laser profilometry). Compatible with:

Applied Materials 5500 DPS II Etch (2002–2005)
5500X DPS II Etch (2006–2008)
5500XT DPS II Etch (2007–2009)
Incompatible with: 0200-09565 (silicon carbide variant for high-density plasma tools). Cross-check the chamber’s RF matching network—older DPS II models require impedance calibration after replacement.

What to Check Before Buying a Used 0200-09564 in 2026

Crack depth: Use a 5X magnifier and go/no-go gauge—reject parts with cracks >50µm.
Erosion measurement: Laser profilometer must confirm <0.7mm wear on the inner wafer edge.
Delamination: Shine a 365nm UV light on the RF coating—flakes or bubbles indicate plasma arcing risk.
Wafer start count: Avoid parts from tools with >180k wafer starts; silicon fatigue increases edge non-uniformity.
RF uniformity test: Bench-test with a vector network analyzer (VNA) to confirm <±3% S11 reflection coefficient at 13.56MHz.

FAQ

Q: Is 0200-09564 used or refurbished better for high-volume etch?
A: Refurbished parts with reworked silicon are ideal for tools running >10k wafers/year. Used parts with <0.4mm erosion suffice for low-volume