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Applied Materials

Applied Materials 0200-09564 Focus Ring (300mm DPS II Etch) - Replacement & Failure Guide

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Applied Materials

Applied Materials 0200-09564 Focus Ring (300mm DPS II Etch) - Replacement & Failure Guide

Name: Applied Materials 0200-09564 Focus Ring (300mm DPS II Etch) - Replacement & Failure Guide
Brand: Applied Materials
SKU: 0200-09564

Part No. 0200-09564

Market Price

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Available by Request

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Applied Materials 0200-09564 Focus Ring (300mm DPS II Etch) - Replacement & Failure Guide moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used Applied Materials 0200-09564 Focus Ring (300mm DPS II Etch) - Replacement & Failure Guide cost in 2026?

Pricing for used Applied Materials 0200-09564 Focus Ring (300mm DPS II Etch) - Replacement & Failure Guide units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Applied Materials Process Kit vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Applied Materials 0200-09564 Focus Ring (300mm DPS II Etch) - Replacement & Failure Guide from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

0200-09564 Specifications and Compatible Tools

This silicon focus ring operates at 13.56MHz RF, 300–400°C process temps, and handles up to 5kW forward power. Key spec: max allowable erosion of 0.7mm (measured via laser profilometry). Compatible with:

Applied Materials 5500 DPS II Etch (2002–2005)
5500X DPS II Etch (2006–2008)
5500XT DPS II Etch (2007–2009)
Incompatible with: 0200-09565 (silicon carbide variant for high-density plasma tools). Cross-check the chamber’s RF matching network—older DPS II models require impedance calibration after replacement.

What to Check Before Buying a Used 0200-09564 in 2026

Crack depth: Use a 5X magnifier and go/no-go gauge—reject parts with cracks >50µm.
Erosion measurement: Laser profilometer must confirm <0.7mm wear on the inner wafer edge.
Delamination: Shine a 365nm UV light on the RF coating—flakes or bubbles indicate plasma arcing risk.
Wafer start count: Avoid parts from tools with >180k wafer starts; silicon fatigue increases edge non-uniformity.
RF uniformity test: Bench-test with a vector network analyzer (VNA) to confirm <±3% S11 reflection coefficient at 13.56MHz.

FAQ

Q: Is 0200-09564 used or refurbished better for high-volume etch?
A: Refurbished parts with reworked silicon are ideal for tools running >10k wafers/year. Used parts with <0.4mm erosion suffice for low-volume