0200-40031 — Focus Ring, 300mm Silicon (DPS Etch) (Applied Materials)

Name: 0200-40031 — Focus Ring, 300mm Silicon (DPS Etch) (Applied Materials)
Brand: Applied Materials
SKU: 0200-40031
Price: 258750 USD
Availability: InStock

Part No. 0200-40031

Market Price

→ Stable

$150K–$368K

Typical secondary market pricing · USD

Low $150,000Avg $258,750High $367,500

Save 50-70% vs OEM new

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Last verified: 2026-05-16

Request Quote · $150K – $368K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Market Data

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How much does a used 0200-40031 — Focus Ring, 300mm Silicon (DPS Etch) (Applied Materials) cost in 2026?

A used 0200-40031 — Focus Ring, 300mm Silicon (DPS Etch) (Applied Materials) from Applied Materials typically sells for $150k – $368k on the secondary market in 2026. That's a savings of 50-70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Applied Materials Parts & Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 50-70% vs. new OEM

✓Lead time: 2-4 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used 0200-40031 — Focus Ring, 300mm Silicon (DPS Etch) (Applied Materials) from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2-4 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does 0200-40031 Cost in 2026?

In 2026, used 0200-40031 units range from $150,000–$367,500, depending on RF-hours and surface wear. Refurbished units with <20,000 RF-hours and recertified impedance profiles typically price between $250,000–$300,000. OEM new units list at $450,000–$550,000, making used purchases 50–70% cheaper. Units with >40,000 RF-hours often show silicon delamination and require dielectric testing before use. Price volatility in 2026 reflects reduced OEM production of DPS systems and increased demand for 300mm wafer compatibility. Buyers should verify installation dates: units from 2010–2015 may lack updated RF coupling geometry required for modern etch recipes.

0200-40031 Specifications and Compatible Tools

This 300mm silicon focus ring operates in 13.56MHz RF environments with 2,000W–4,000W forward power and <5% VSWR. It supports Cl₂/BCl₃/O₂ gas mixtures at 50–60sccm flow rates. Compatible tools include AMAT Centura DPS (1998–2005) and AMAT Centura DPS II (2003–2010). Do not use with 0200-40032 variants, which require different impedance matching networks. Verify the RF choke model (0200-40017A) for compatibility. DPS II systems require a 0200-40031B revision for high-density plasma modes. Always cross-check the etch chamber serial number to confirm DPS vs. DPS II configuration.

What to Check Before Buying a Used 0200-40031 in 2026

RF-hour count: Reject units >40,000 hours; silicon fatigue increases plasma leakage.
Surface inspection: Use a 10X loupe to check for cracks >0.2mm or delamination >5% surface area.
Impedance test: Measure with an LCR meter; Z must be 50–60Ω @ 13.56MHz.
Gas flow uniformity: Test with a mass flow controller; deviation >10% from 50sccm indicates erosion.
Plasma uniformity scan: Run a 300mm wafer profilometer test; >15% non-uniformity requires reprofiling.
Installation year: Units installed pre-2012 may lack the 0200-40031-RevC edge contour upgrade.

Q: Is 0200-40031 better than 0200-40032 for DPS Etch?
A: Yes. The 0200-40031 is designed for DPS systems, while 0200-40032 is for AMAT’s Indus platform. Mixing parts causes RF mismatch and arcing.

Q: Why is 0200-40031 pricing dropping in 2026?
A: OEM shift to 450mm tools and increased used inventory from decommissioned DPS lines.

Q: How long for delivery after purchase?
A: 2–4 weeks post-sourcing, pending RF testing and shipping logistics.

Q: Can I use this on a 200mm wafer system?
A: No. The 300mm design alters edge plasma coupling, causing defects. Use 0200-40029 for