AMAT Edge Ring Buying Guide — 200mm & 300mm

AMAT Edge Ring Specifications and Compatible Tools

Key specs:

• Material: Quartz (99.99% purity) or aluminum nitride (for high-density plasma tools)
• Dimensions: 200mm (Ø230–260mm) / 300mm (Ø340–380mm), thickness 15–22mm
• Thermal tolerance: -20°C to 350°C (-4°F to 662°F)
• RF frequency compatibility: 13.56MHz (standard etch systems)

Compatible tools:

• Applied Materials Centura DSiE (models 8920/8922, 2000–2010)
• Applied Materials Reflexion XP (models 8840/8842, 2005–2012)
• Applied Materials Producer HDP-CVD (models 8200/8220, 2003–2008)

Exclusion: Not compatible with Tokyo Electron Ltd. etch systems (e.g., HCP-200) without custom adapters. Verify tool’s RF matching network design before installation.

What to Check Before Buying a Used AMAT Edge Ring in 2026

1. Surface integrity: Inspect for cracks >0.1mm using a 4x magnifying loupe or optical comparator. Reject any with chipped edges.
2. Dimensional tolerance: Measure outer diameter with a digital caliper (±0.05mm deviation from OEM specs is acceptable).
3. Thermal stress testing: Use an infrared pyrometer to check for uneven heat distribution (>15°C variance across surface).
4. Cycle count verification: Request process logs—edge rings beyond 3,000 cycles risk plasma uniformity degradation.
5. Material consistency: For quartz parts, perform a UV-Vis spectrophotometer test to confirm purity (absorbance <0.01A at 214nm).

Parts from tools decommissioned pre-2015 may have suboptimal RF coupling due to outdated metallization layers.

FAQ

Q: How do I determine the correct edge ring size for my tool?
A: