AMAT Endura PVD Chamber Module

Name: AMAT Endura PVD Chamber Module
Brand: Applied Materials

Market Price

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Available by Request

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for AMAT Endura PVD Chamber Module moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used AMAT Endura PVD Chamber Module cost in 2026?

Pricing for used AMAT Endura PVD Chamber Module units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Applied Materials Parts & Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used AMAT Endura PVD Chamber Module from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

AMAT Endura PVD Chamber Module Specifications and Compatible Tools

Operates at 1×10⁻⁶ Torr base pressure, 2–8 kW DC/RF power, 48V–480V AC input. Dimensions: 1.2m H × 1.0m W × 0.8m D. Compatible with:

Applied Materials Endura 5500 Series (2005–2010)
Endura 5550-Cluster (2011–2015)
Endura 5550Xe (2016–2018)
Exclusion: Not compatible with Lam Research P5500 due to divergent port configurations (AMAT uses 4× 2” CF vs Lam’s 3× 3” ISO-KF). Verify OEM part number 5550-CHM-02 for Endura 5550-Cluster compatibility.

What to Check Before Buying a Used AMAT Endura PVD Chamber Module in 2026

Vacuum integrity: Test base pressure with a Pfeiffer PrO2000; reject if >5×10⁻⁶ Torr after 24h.
Target erosion: Measure remaining sputtering target thickness via ultrasonic gauge; <0.5mm mandates replacement.
Electrical continuity: Use Fluke 1587 FC multimeter; resistance between RF coil terminals must be <0.1Ω.
Corrosion in exhaust ports: Visually inspect for bluish oxidation (indicative of H2O exposure); reject modules >12 years old without full bakeout logs.
Door seal alignment: Perform helium leak test with Inficon HM-6; >1×10⁻⁷ mbar·L/s indicates seal failure.

FAQ

Q: What’s the difference between used and refurbished AMAT Endura modules?
A: Used modules are operational but may lack recent maintenance; refurbished units include full disassembly, OEM-part replacements, and recalibration.

Q: Can this module handle 300mm wafers?
A: No—Endura PVD chambers