AMAT Endura PVD Chamber Module

Name: AMAT Endura PVD Chamber Module
Brand: Applied Materials
Price: 2007 USD
Availability: InStock

Market Price

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1 active listing

From $2K

Typical secondary market pricing · USD

Low $2,007Avg $2,007High $2,007

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Request Quote · $2K – $2K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

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How much does a used AMAT Endura PVD Chamber Module cost in 2026?

A used AMAT Endura PVD Chamber Module from Applied Materials typically sells for $2k – $2k on the secondary market in 2026. That's a savings of 40–70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Applied Materials Parts & Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 40–70% vs. new OEM

✓Lead time: 2–6 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used AMAT Endura PVD Chamber Module from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2–6 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does AMAT Endura PVD Chamber Module Cost in 2026?

Used modules range from $25,000 to $45,000 in 2026, depending on age (2010–2018 production cycles) and material configuration (TiN or Cu). Refurbished units (with OEM-certified rebuilds) start at $50,000–$75,000, offering 62–74% savings over new pricing (~$180,000). Modules with >10,000 process cycles or >12-year lifecycle typically drop 20–30% below market average. Caveat: Modules configured for IMP (Ionized Metal Plasma) sputtering require 15%–20% premium due to complex RF coil integration.

AMAT Endura PVD Chamber Module Specifications and Compatible Tools

Operates at 1×10⁻⁶ Torr base pressure, 2–8 kW DC/RF power, 48V–480V AC input. Dimensions: 1.2m H × 1.0m W × 0.8m D. Compatible with:

Applied Materials Endura 5500 Series (2005–2010)
Endura 5550-Cluster (2011–2015)
Endura 5550Xe (2016–2018)
Exclusion: Not compatible with Lam Research P5500 due to divergent port configurations (AMAT uses 4× 2” CF vs Lam’s 3× 3” ISO-KF). Verify OEM part number 5550-CHM-02 for Endura 5550-Cluster compatibility.

What to Check Before Buying a Used AMAT Endura PVD Chamber Module in 2026

Vacuum integrity: Test base pressure with a Pfeiffer PrO2000; reject if >5×10⁻⁶ Torr after 24h.
Target erosion: Measure remaining sputtering target thickness via ultrasonic gauge; <0.5mm mandates replacement.
Electrical continuity: Use Fluke 1587 FC multimeter; resistance between RF coil terminals must be <0.1Ω.
Corrosion in exhaust ports: Visually inspect for bluish oxidation (indicative of H2O exposure); reject modules >12 years old without full bakeout logs.
Door seal alignment: Perform helium leak test with Inficon HM-6; >1×10⁻⁷ mbar·L/s indicates seal failure.

FAQ

Q: What’s the difference between used and refurbished AMAT Endura modules?
A: Used modules are operational but may lack recent maintenance; refurbished units include full disassembly, OEM-part replacements, and recalibration.

Q: Can this module handle 300mm wafers?
A: No—Endura PVD chambers