Applied Materials P5000 CVD System: Technical Specifications & Buying Guide

Name: Applied Materials P5000 CVD System: Technical Specifications & Buying Guide
Brand: Applied Materials

Market Price

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Available by Request

Last verified: 2026-05-16

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Applied Materials P5000 CVD System: Technical Specifications & Buying Guide moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used Applied Materials P5000 CVD System: Technical Specifications & Buying Guide cost in 2026?

Pricing for used Applied Materials P5000 CVD System: Technical Specifications & Buying Guide units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Applied Materials CVD Equipment vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Applied Materials P5000 CVD System: Technical Specifications & Buying Guide from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

Specifications and Compatible Tools

Key specs: 5kW RF power (13.56 MHz), 480V 3-phase power supply, gas flow rates up to 10 slm (N2), and vacuum pumping speed of 500 L/s. Compatible with Applied Materials Centura platforms (models 5500, 6500) from 2001–2008. Warning: AMAT P5000-1147 gas box is incompatible with 2010+ Centura variants due to pressure sensor interface differences. Verify gas box part number before integration.

What to Check Before Buying a Used in 2026

RF hours: Reject units >40,000 hours without RF generator logs (check via AMAT P5000-3010 service module).
Gas delivery system: Test mass flow controllers (MFCs) with a calibrated gas mixer; >5% deviation at 10 slm requires replacement.
Vacuum integrity: Perform Helium Leak Test (HLT) using a Pfeiffer PRM 411; >1×10⁻⁸ mbar·L/s indicates pump failure.
Chamber lifecycle: Units >10 years old often need susceptor replacement (part number AMAT-P5000-4521).
Thermal uniformity: Measure wafer temperature profile with a pyrometer; >±3°C variation invalidates process compliance.

Q: Used vs. refurbished — which is better for 2026 buyers?
A:

Q: Will it integrate with 200mm TEL P5000 tools?
A: No. The AMAT P5000 uses a proprietary gas box interface incompatible with TEL’s P5000 series.

Q: How much can I save vs. new in 2026?
A: 40–70% savings, assuming a used unit with standard RF hours and no major rebuilds.