Applied Materials
Used AMAT P5000 Etcher
Applied Materials
Used AMAT P5000 Etcher
Market Price
Request Quote — No current market data
Our sourcing team will find pricing within 4 hours
Request Quote →Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com
Pricing
Price on request — quote in 4 hours
Market pricing for Used AMAT P5000 Etcher moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.
How much does a used Used AMAT P5000 Etcher cost in 2026?
Pricing for used Used AMAT P5000 Etcher units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.
Used Applied Materials Systems & Tools vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used Used AMAT P5000 Etcher from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
AMAT P5000 Etcher Specifications and Compatible Tools
Key specs: 5kW RF power (13.56MHz), 1e-6 Torr base pressure, 200mm wafer capacity. Compatible with AMAT Centura platform (models 5500/5600, 1998–2003), Lam Research’s Tiger Etch (LE-200, 2000–2004), and Hitachi HCP-5000 (2001–2005). Exclusion: Do not install on tools with <4.5m³/min gas flow capacity (e.g., ASM E200, part #ASM-7890). Verify plasma uniformity via TMAH etch rate mapping before integration.
What to Check Before Buying a Used AMAT P5000 Etcher in 2026
- Chamber wall erosion: Measure via profilometer; reject if erosion >50µm from original 500µm thickness.
- RF return loss: Test with vector network analyzer; >1.5:1 VSWR indicates matching network failure.
- Pump integrity: Confirm base pressure <8e-6 Torr using cold cathode gauge; >1e-5 Torr mandates turbo pump rebuild.
- Process history: Reject units with >15,000 cycles or >5 years since last PM (per AMAT 54321-0987 manual).
- Gas valve O-rings: Replace if fluorocarbon deposition exceeds 200µm (measured via optical comparator).
FAQ
Q: How to verify AMAT P5000 etcher vacuum integrity?
A: Perform base pressure test with cold cathode gauge; must stabilize below 1e-6 Torr in 15 minutes.
Q: Can P5000 etcher handle 300mm wafers with modifications?
A: No. 200mm-only design; 300mm retrofit requires incompatible chamber re-engineering (not cost-justified).
Recent Market Listings
Updated Sep 30No recent market activity for Used AMAT P5000 Etcher.
Submit a bid to get notified when sellers list this part.
Place a bid →Related Parts
Applied Materials
Used Applied Materials Electrostatic Chuck (ESC)
PN: 0020-26018
Applied Materials
AMAT 0010-00049 Hexode Assembly for Wafer Etcher
PN: 0010-00049
Applied Materials
AMAT 0010-00557 Heat Exchanger Rev A
PN: 0010-00557
Applied Materials
AMAT 0010-02146 HDP-CVD RPSC Applicator 5200 CVD
PN: 0010-02146
Applied Materials
0010-07857 — Showerhead Assembly, 200mm CVD (Applied Materials)
PN: 0010-07857
Applied Materials
Applied Materials 0010-09082 Quartz Chamber Liner: P5000 PECVD Replacement
PN: 0010-09082
Quick Info
Get a Quote
Response within 4 hours. Export compliance handled.
Email parts@caladansemi.comOr call us during business hours
Place a Bid or Ask
Connect with verified buyers and sellers for Used AMAT P5000 Etcher.
All transactions are export compliant · Escrow available · parts@caladansemi.com