AMAT 0020-09564 Focus Ring (Alternate Listing)

Name: AMAT 0020-09564 Focus Ring (Alternate Listing)
Brand: Applied Materials

Market Price

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Available by Request

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for AMAT 0020-09564 Focus Ring (Alternate Listing) moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used AMAT 0020-09564 Focus Ring (Alternate Listing) cost in 2026?

Pricing for used AMAT 0020-09564 Focus Ring (Alternate Listing) units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Applied Materials Parts & Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used AMAT 0020-09564 Focus Ring (Alternate Listing) from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

AMAT 0020-09564 Focus Ring Specifications and Compatible Tools

Material: Fused quartz with PTFE-coated inner cavity
Dimensions: 200mm OD × 15mm thickness, 0.2mm surface flatness tolerance
Operating Temp: -20°C to 300°C (-4°F to 572°F)
Compatible Tools:
- Centura 5500 Etch Chamber (2005–2012 production)
- Centura 5500X (2008–2014)
- Centura 5500i (2010–2015)
Exclusion: Not compatible with Centura 5500E (part #0020-09872), which uses a dual-ring design. Cross-referencing the chamber’s serial number (prefix “CE5-”) is mandatory to avoid misalignment faults.

What to Check Before Buying a Used AMAT 0020-09564 Focus Ring in 2026

Surface Cracks: Use a 10× loupe to inspect for microfractures; reject parts with cracks >0.1mm in depth (measured via laser profilometry).
Thickness Loss: Measure with a digital micrometer at 4 quadrants; thickness must be ≥14.5mm (original spec: 15.0mm ±0.2mm).
Coating Integrity: UV light test (365nm wavelength) for PTFE delamination; >5% flaking invalidates part.
Cycle History: Demand process logs; rings