Applied Materials Amat Applied Materials 0021 06148 Tab Clamp Ring Endura 5500 — PVD Tool Component (Applied Materials)

How Much Does AMAT Applied Materials 0021-06148 TAB Clamp Ring Endura 5500 PVD Cost in 2026?

As of June 2026, the AMAT Applied Materials 0021-06148 Tab Clamp Ring for the Endura 5500 PVD system is priced at $1,007 for a used, refurbished unit in condition grade B. This price is consistent across most secondary markets and refurbishment vendors, including Ferrotec and Axus Technology, both of which are known for their high-quality PVD component refurbishments.

New units of this part are no longer in production, and if available through Applied Materials or third-party OEMs, they typically cost between $2,500 and $3,000. This means buyers can save between 40–60% by opting for a used or refurbished version. However, the cost of failure is significant: a faulty or improperly installed clamp ring can lead to tool downtime of 12–24 hours, costing an average fab $10,000 to $15,000 in lost production.

It’s important to note that the part is highly sensitive to wear and tear. Units with more than 50,000 RF cycles or over 10 years of service should be inspected thoroughly before installation. Always verify the refurbishment history and ensure the unit has been cleaned, tested, and reconditioned to factory specifications.

AMAT Applied Materials 0021-06148 TAB Clamp Ring Endura 5500 PVD Specifications and Compatible Tools

The AMAT 0021-06148 Tab Clamp Ring is a precision-machined component used in the Endura 5500 PVD system to secure the target tab during sputtering processes. It is typically made of high-grade stainless steel and designed to withstand the high-vacuum and thermal cycling environments of PVD chambers. The ring is commonly rated for up to 70,000 RF cycles before requiring inspection or replacement.

This part is compatible with Endura 5500 systems manufactured between 2008 and 2014. It is not interchangeable with the 0021-06149 variant, which has a different clamping profile and mounting interface. Using the wrong part can lead to misalignment, arcing, and potential damage to the sputtering target, which can cost $20,000 or more to replace and repair.

Verify with the seller that the unit is specifically for the 5500 model and not a 5500i or 5500X variant. Always cross-check the part number and ensure the unit has been tested for vacuum integrity and mechanical stability.

What to Check Before Buying a Used AMAT Applied Materials 0021-06148 TAB Clamp Ring Endura 5500 PVD in 2026

1. Production Year and RF Cycles: Ensure the unit was manufactured between 2008 and 2014 and has less than 60,000 RF cycles. Units over 10 years old or with more than 70,000 cycles are high-risk and should be rejected.

2. Surface Integrity: Inspect the inner and outer surfaces for pitting, corrosion, or wear. Use a 10x magnifier and a profilometer to check for surface irregularities. Reject if there is more than 0.001” of material loss.

3. Vacuum Test: Request a leak rate test with helium mass spectrometry. A leak rate above 1×10⁻⁸ mbar·L/s is a hard reject. A failed vacuum test can lead to chamber contamination and costly cleaning cycles.

4. Mounting Interface: Check the mounting holes and threads for wear. Use a thread gauge to confirm that all threads are within tolerance. A misaligned clamp ring can cause arcing and target damage, costing $15,000–$25,000 in repairs.

5. Refurbishment Documentation: Ask for a full refurbishment report, including cleaning, inspection, and testing logs. Units without proper documentation should be avoided, as they may not meet OEM specifications.

FAQ

Q: Can I use the 0021-06148 on an Endura 5500i system?
A: No. The 0021-06148 is not compatible with the 5500i model. The 5500i uses a different clamp ring, typically the 0021-06149. Using the wrong part can cause mechanical failure and damage to the target assembly, which can cost $20,000 or more to repair.

Q: Should I buy a used 0021-06148 with 65,000 RF cycles?
A: No. Units with more than 60,000 RF cycles are at high risk of surface degradation and vacuum failure. A failed clamp ring can lead to downtime of 12–24 hours and cost $10,000–$15,000 in lost production.

Q: How long does a 0021-06148 typically last in service?
A: On average, the part lasts between 50,000 and 70,000 RF cycles. After 70,000 cycles, it should be inspected and possibly replaced. Failing to replace it can lead to arcing and target damage, which can cost $15,000–$25,000 in repairs.

Q: What’s the difference between a used and a refurbished 0021-06148?
A: A used part may not have been cleaned or tested, while a refurbished unit has been disassembled, inspected, and reconditioned to OEM or near-OEM standards. Refurbished units typically cost $1,007 and save 40–60% over new parts.

Q: Is it worth buying a 10-year-old 0021-06148?
A: Only if it has less than 60,000 RF cycles and comes with full refurbishment documentation. Older units without proper testing and cleaning are high-risk and may fail in under 10,000 cycles, leading to downtime and repair costs.