Applied Materials Amat Applied Materials 0021 35793 200Mm Shadow Ring Cu Cvd E — Shadow Ring for CVD Endura Tools (Applied Materials)

How Much Does AMAT Applied Materials 0021-35793 200mm Shadow Ring Cu CVD Endura Cost in 2026?

As of June 2026, the price for a used AMAT Applied Materials 0021-35793 200mm Shadow Ring Cu CVD Endura typically ranges from $505 to $505, depending on the condition and source. Units in Grade B condition, which is typical for used parts in this category, are available in the mid-range. Refurbished options from vendors like Ferrotec and Covalent Materials can offer similar pricing, though they may include additional testing and certification, which can add 10–15% to the base price.

Compared to a new unit, which can cost upwards of $1,200–$1,500, buying a used or refurbished part can save you 40–60%. This is a significant cost reduction, especially when considering the $10,000+ in lost production a facility may face per day if a CVD Endura tool is down due to a missing or failed shadow ring.

However, it's important to note that condition is critical. A part with visible pitting, warping, or more than 10% surface erosion can lead to deposition inconsistencies and should be rejected. Always verify the part's condition with the seller before purchase to avoid costly rework or downtime.

AMAT Applied Materials 0021-35793 200mm Shadow Ring Cu CVD Endura Specifications and Compatible Tools

The AMAT 0021-35793 is a 200mm copper shadow ring designed for use in Applied Materials CVD Endura systems. It is typically rated for 10,000–15,000 RF cycles before requiring inspection or replacement. The part is commonly used in Endura 5500 and 8500 series tools manufactured between 2000 and 2005.

Key specifications include a copper alloy construction, 200mm diameter, and a 0.5–1.0mm thickness. It is designed to control deposition profiles and reduce shadowing effects during chemical vapor deposition processes. The part is not interchangeable with 0021-35792, which is a different shadow ring model for a different chamber configuration.

Failure of this part can lead to uneven film deposition, which may require $5,000–$8,000 in rework and 2–3 days of tool downtime. Always verify compatibility with your specific tool model and process requirements before installation.

What to Check Before Buying a Used AMAT Applied Materials 0021-35793 200mm Shadow Ring Cu CVD Endura in 2026

1. Surface Condition: Inspect for pitting, warping, or erosion. Reject any part with more than 10% surface degradation. Surface imperfections can lead to deposition irregularities and rework costs of $3,000–$5,000.

2. Production Year: Confirm the part was manufactured between 2000 and 2005. Older parts may have different tolerances or coating materials that could compromise performance.

3. RF Cycle Count: Request the number of RF cycles the part has undergone. A part with more than 15,000 cycles should be inspected or replaced to avoid process failure.

4. Test Methods: Ask the seller to provide plasma arc testing and dimensional inspection reports. These tests verify the part’s structural integrity and fit within the tool.

5. Reject if: The part has been exposed to chlorine-based etch processes, as this can cause copper degradation. A failed part in this scenario can lead to $7,000+ in tool downtime and rework.

Always request a 30-day return policy and a warranty on performance. This gives you recourse if the part fails to meet expectations in production.

FAQ

Q: Can I use the 0021-35793 in an Endura 8500 tool?
A: Yes, the 0021-35793 is commonly used in Endura 8500 tools produced between 2000 and 2005. However, it is not compatible with 0021-35792, which is a different model.

Q: Should I buy a used 0021-35793 or wait for a new one?
A: If your tool is down and you need a replacement within 2–3 days, buying a used part is the best option. A new unit can take 6–8 weeks to arrive and cost $1,200–$1,500 more.

Q: How long does a 0021-35793 typically last?
A: A well-maintained 0021-35793 can last 10,000–15,000 RF cycles. Beyond that, it should be inspected for wear and potential replacement.

Q: What is the difference between 0021-35793 and 0021-35792?
A: The 0021-35792 is a different shadow ring model used in a different chamber configuration. Using the wrong part can lead to $5,000+ in rework and 2–3 days of downtime.

Q: Is a Grade B part acceptable for production use?
A: Yes, as long as the part passes plasma arc testing and has less than 10% surface erosion. A Grade B part can perform reliably for 10,000–12,000 RF cycles in most production environments.