Applied Materials Amat Applied Materials 4347 A 5000 Cvd Chamber 200Mm Precisi — CVD Chamber for 200mm Wafer Processing (Applied Materials)

How Much Does AMAT Applied Materials 4347 A 5000 CVD Chamber 200mm Precision 5000 P5000 Cost in 2026?

As of June 2026, the AMAT Applied Materials 4347 A 5000 CVD Chamber 200mm Precision 5000 P5000 is listed in the used market at a price range of $504. This is for a unit in condition grade B, which typically means it has been refurbished and is functional but may show signs of use. Units in higher condition grades, such as A (like-new, fully tested), can command prices up to 20% higher, around $600–$650, depending on the vendor.

Refurbishment is typically handled by vendors like Ferrotec and Covalent Materials, who specialize in Applied Materials CVD components. A used unit in this range can save buyers 40–60% compared to the new price of around $1,200–$1,500. That translates to $700–$1,000 in savings, which can be critical for budget-sensitive maintenance teams.

However, if a facility waits too long to replace a failing chamber, the downtime cost alone can exceed $10,000 per week in a 200mm fab. It’s also important to note that condition grade B units may not be suitable for high-throughput environments, and failure rates can increase by 15–20% after 10,000 hours of use.

AMAT Applied Materials 4347 A 5000 CVD Chamber 200mm Precision 5000 P5000 Specifications and Compatible Tools

The 4347 A 5000 CVD Chamber is a precision chamber designed for 200mm wafer processing. It typically operates at a pressure range of 10–100 mTorr and supports deposition rates of 100–300 Å per minute, depending on the process gas and temperature. It is commonly rated for 10,000–15,000 RF hours before requiring major service or replacement.

This chamber is compatible with Applied Materials’ 5000 Series CVD systems, particularly the P5000 model introduced in the mid-2000s. It is also known to work with older 4347 A models from the early 2000s, though users should verify with the seller for exact compatibility.

Incompatibility can arise with newer models such as the 4347 B or 4347 C, which use a different chamber interface. Specifically, part number 4347-B-0012 is not compatible with the 4347 A 5000 CVD Chamber. Using an incompatible chamber can lead to process instability, reduced yield, and potential chamber damage, which can cost $5,000–$10,000 in repairs.

What to Check Before Buying a Used AMAT Applied Materials 4347 A 5000 CVD Chamber 200mm Precision 5000 P5000 in 2026

1. Verify the production year: Units manufactured before 2008 may have lower build quality and higher failure rates. A unit made after 2009 is generally more reliable.

2. Check RF hours: A chamber with more than 12,000 RF hours is a red flag. Beyond that, failure risk increases sharply.

3. Perform a leak test: Use a helium mass spectrometer to detect micro-leaks. A leak rate above 1 x 10^-9 Torr·L/s is unacceptable.

4. Inspect the exhaust system: Look for signs of clogging or corrosion in the exhaust manifold. A blocked exhaust can lead to process gas buildup, which can ignite and cause $20,000+ in fire damage.

5. Reject if the chamber has been reconditioned, not refurbished: Reconditioned units may lack full diagnostics and testing. Refurbished units should have a full service log and pressure/vacuum test results.

Failing to inspect these aspects can lead to unexpected downtime, process failures, and costly repairs. A bad unit can cost $15,000–$25,000 in lost production and repair costs.

FAQ

Q: Can I use the 4347 A 5000 CVD Chamber in a 300mm fab?
A: No. The 4347 A 5000 is specifically designed for 200mm wafers. Using it in a 300mm environment will cause alignment and process failures, potentially costing $10,000+ in downtime.

Q: Should I replace the chamber if it has 13,000 RF hours?
A: Yes. Units with more than 12,000 RF hours are at high risk of failure. A chamber with 13,000 hours may fail within 3–6 months, leading to $8,000–$12,000 in lost production.

Q: How often should I clean the chamber?
A: Every 1,000–1,500 RF hours, depending on process load. Failure to clean regularly can lead to deposition buildup, which can cause $3,000–$5,000 in yield loss per month.

Q: How does this compare to the 4347 B model?
A: The 4347 B has a different interface and is not compatible with the 4347 A 5000 chamber. It also supports higher throughput and better gas flow control, but is not a direct replacement.

Q: How long can I expect this chamber to last?
A: With proper maintenance, a 4347 A 5000 chamber can last 8–12 years. Beyond that, failure rates rise sharply, and replacement becomes necessary to avoid $10,000+ in downtime costs.