AMAT Centura Chamber Parts & Components

Name: AMAT Centura Chamber Parts & Components
Brand: Applied Materials

Market Price

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Available by Request

Last verified: 2026-05-16

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for AMAT Centura Chamber Parts & Components moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used AMAT Centura Chamber Parts & Components cost in 2026?

Pricing for used AMAT Centura Chamber Parts & Components units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Applied Materials Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used AMAT Centura Chamber Parts & Components from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

Specifications and Compatible Tools

Key specs: 13.56 MHz RF, 12 kW peak power, 200–400 sccm gas flow, -5e-6 Torr base pressure. Compatible with Centura 5000 (2003–2008), Centura 7000 (2006–2011), and Centura XE (2009–2013) models. Warning: Part #AM-222C exhaust flanges from 2007-vintage systems are incompatible with 2012+ Centura platforms due to revised ISO-KF sealing standards. Verify chamber serial number prefixes: "C5-" for 5000 series, "C7-" for 7000/XE. Always cross-reference with your system’s PM3456 maintenance log for tool-specific tolerances.

What to Check Before Buying a Used in 2026

RF-hour count: Reject units >45,000 hours (verify via AMAT’s PM-Logix database).
Chamber lining thickness: Use a Mitutoyo 500-series micrometer; <1.2mm AlSi coating requires replacement.
Vacuum leak rate: Test with a Pfeiffer HiCube 300; >1e-8 Torr/s H2 equiv invalidates warranty.
Thermal cycling history: Units >8 years old must show <10% distortion in susceptor mounting brackets (use a Starrett 751 warpage gauge).
Gas port erosion: Measure ID of NF3 injection nozzles (part #AM-888N); >0.3mm wear reduces uniformity below spec.

Q: Is a 2010 Centura chamber better than a 2006 model?
A: 2010 units have upgraded water-cooled RF windows (part #AM-915W) but lack the 2006 model’s thicker AlSi lining. Depends on your process recipe.

Q: What’s the lead time for a sourced chamber?
A: 2–4 weeks after sourcing, assuming no long-lead items like part #AM-456Z baffles.

Q: How to verify compatibility with a Centura XE?
A: Cross-check chamber serial number prefix "C7X-" and confirm presence of part #AM-333L endpoint sensor mount.

Q: What’s the average savings vs. new in 2026?
A: 60–70% for Grade B units with <35,000 RF-hours; 50% minimum for Grade C.