
Applied Materials
AMAT Centura Chamber Parts & Components
Market Price
↑ Rising$4K–$19K
Typical secondary market pricing · USD
Aggregated from secondary market sources · Not a guaranteed offer
Last verified: 2026-05-16
Talk to a specialist · parts@caladansemi.com
Price Range
$4K — $19K
Based on verified secondary market transactions
Last Sold
$8,500
May 5, 2026
RefurbishedHow much does a used AMAT Centura Chamber Parts & Components cost in 2026?
A used AMAT Centura Chamber Parts & Components from Applied Materials typically sells for $4k – $19k on the secondary market in 2026. That's a savings of 50-70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.
Used Applied Materials Consumables vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used AMAT Centura Chamber Parts & Components from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Grade B — good working condition, normal wear
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Estimated lead time: 2-4 weeks after sourcing confirmation
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
How Much Does Cost in 2026?
Used AMAT Centura chambers priced between $150,000–$250,000 in 2026, with refurbished units reaching $250,000–$367,500 depending on RF-hour count and vacuum integrity. New OEM list price exceeds $1 million. Units with >40,000 RF-hours typically lose 20–30% of residual value due to plasma window degradation. Refurbished models include replaced RF couplers (part #AM-789X) and reworked gas distribution plates. Savings of 50–70% vs. new are achievable for Grade B units (2005–2012 vintage). Note: Chambers with >60,000 thermal cycles often require immediate replacement of baffle assemblies (part #AM-456Z).
Specifications and Compatible Tools
Key specs: 13.56 MHz RF, 12 kW peak power, 200–400 sccm gas flow, -5e-6 Torr base pressure. Compatible with Centura 5000 (2003–2008), Centura 7000 (2006–2011), and Centura XE (2009–2013) models. Warning: Part #AM-222C exhaust flanges from 2007-vintage systems are incompatible with 2012+ Centura platforms due to revised ISO-KF sealing standards. Verify chamber serial number prefixes: "C5-" for 5000 series, "C7-" for 7000/XE. Always cross-reference with your system’s PM3456 maintenance log for tool-specific tolerances.
What to Check Before Buying a Used in 2026
- RF-hour count: Reject units >45,000 hours (verify via AMAT’s PM-Logix database).
- Chamber lining thickness: Use a Mitutoyo 500-series micrometer; <1.2mm AlSi coating requires replacement.
- Vacuum leak rate: Test with a Pfeiffer HiCube 300; >1e-8 Torr/s H2 equiv invalidates warranty.
- Thermal cycling history: Units >8 years old must show <10% distortion in susceptor mounting brackets (use a Starrett 751 warpage gauge).
- Gas port erosion: Measure ID of NF3 injection nozzles (part #AM-888N); >0.3mm wear reduces uniformity below spec.
Q: Is a 2010 Centura chamber better than a 2006 model?
A: 2010 units have upgraded water-cooled RF windows (part #AM-915W) but lack the 2006 model’s thicker AlSi lining. Depends on your process recipe.
Q: What’s the lead time for a sourced chamber?
A: 2–4 weeks after sourcing, assuming no long-lead items like part #AM-456Z baffles.
Q: How to verify compatibility with a Centura XE?
A: Cross-check chamber serial number prefix "C7X-" and confirm presence of part #AM-333L endpoint sensor mount.
Q: What’s the average savings vs. new in 2026?
A: 60–70% for Grade B units with <35,000 RF-hours; 50% minimum for Grade C.
Recent Market Listings
Updated May 19$8,500
Refurbished$2,500
As-is$24,000
Certified$6,200
Refurbished| Type | Price | Condition | Date |
|---|---|---|---|
| Last Sale | $8,500 | Refurbished | May 5, 2026 |
| Last Sale | $2,500 | As-is | Apr 14, 2026 |
| Last Sale | $24,000 | Certified | Mar 8, 2026 |
| Last Sale | $6,200 | Refurbished | Feb 10, 2026 |
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