Evaporators — Used CHA SE-600 (CHA)

How Much Does Used CHA SE-600 Cost in 2026?

The used CHA SE-600 evaporator typically sells in the range of $49,500 in 2026, depending on its condition and refurbishment history. Units in condition grade A, with full documentation and recent calibration, can command up to $52,000, while those in grade B—like the current listing—fall closer to the lower end. Refurbishers such as Ferrotec and Axus Technology commonly handle these units, offering savings of 40–60% compared to a new CHA evaporator, which can cost between $100,000 and $120,000.

Purchasing a lower-grade unit without proper verification can lead to downtime costs of $10,000–$15,000 per week if the evaporator fails shortly after installation. It’s also worth noting that the SE-600 is typically 10–15 years old, so its remaining useful life is a key factor in determining value. Always request a recent maintenance log and verify the number of deposition cycles completed—units with over 15,000 cycles may be nearing end-of-life.

Used CHA SE-600 Specifications and Compatible Tools

The CHA SE-600 is a thermal evaporator commonly used in thin-film deposition processes for semiconductor and photovoltaic applications. It typically operates at a maximum temperature of 1,200°C and features a chamber size of approximately 12 inches in diameter. The unit is designed for use with materials like aluminum, gold, and indium tin oxide. It has a typical service life of 10–15 years or 15,000–20,000 deposition cycles, depending on usage intensity.

This evaporator is compatible with older CHA deposition systems, such as the CHA-DEP 3000 and CHA-DEP 4000 models, which were commonly used in the mid-2000s. However, it is not compatible with newer systems like the CHA-DEP 5000 due to differences in control interfaces and chamber geometry. Attempting to install the SE-600 in an incompatible system can lead to process instability and equipment damage, potentially costing $5,000–$8,000 in repairs.

What to Check Before Buying a Used CHA SE-600 in 2026

1. Verify the production year. Units manufactured before 2010 may have outdated thermal regulation components, increasing the risk of overheating.
2. Check the number of deposition cycles. Units with more than 15,000 cycles are likely nearing end-of-life and may require a full rebuild.
3. Request a recent calibration report. A unit that hasn’t been calibrated in the last 12 months may have drift in temperature control, leading to inconsistent film thickness.
4. Perform a vacuum integrity test. Use the helium leak test method to confirm the chamber maintains a vacuum of at least 1×10⁻⁶ Torr.
5. Reject if the heating element shows visible degradation. Cracking or pitting in the heating coil is a hard reject criterion, as it can lead to catastrophic failure during operation.

Failing to perform these checks can result in a non-functional unit, leading to $10,000–$15,000 in replacement or repair costs and significant production delays.

FAQ

Q: Can I use the CHA SE-600 with a CHA-DEP 5000 system?
A: No. The CHA SE-600 is not compatible with the CHA-DEP 5000 due to differences in control systems and chamber dimensions. Attempting to install it could damage the system and cost $5,000–$8,000 in repairs.

Q: Should I buy a CHA SE-600 with over 15,000 cycles?
A: It’s not recommended. Units beyond 15,000 cycles are typically nearing end-of-life and may require a full rebuild, which can cost up to $20,000.

Q: How long can I expect a used CHA SE-600 to last?
A: With proper maintenance, a CHA SE-600 can last 5–8 more years, depending on usage. Units with under 10,000 cycles and recent calibration are best suited for long-term use.

Q: What’s the difference in cost between a used and new CHA evaporator?
A: A new CHA evaporator can cost $100,000–$120,000, while a used CHA SE-600 typically sells for around $49,500, offering savings of 40–60%.

Q: How often should I calibrate the CHA SE-600?
A: Every 12 months, or after 2,500 cycles, whichever comes first. Failure to calibrate can lead to process inconsistencies and rework costs of $3,000–$5,000 per batch.