Hitachi High-Tech 3C02-2134-01 ICP Antenna Assembly — Used

Name: Hitachi High-Tech 3C02-2134-01 ICP Antenna Assembly — Used
Brand: Hitachi High-Tech
SKU: 3C02-2134-01

Part No. 3C02-2134-01

Market Price

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Available by Request

Last verified: 2026-05-16

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✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Hitachi High-Tech 3C02-2134-01 ICP Antenna Assembly — Used moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used Hitachi High-Tech 3C02-2134-01 ICP Antenna Assembly — Used cost in 2026?

Pricing for used Hitachi High-Tech 3C02-2134-01 ICP Antenna Assembly — Used units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Hitachi High-Tech RF / Plasma Source vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Hitachi High-Tech 3C02-2134-01 ICP Antenna Assembly — Used from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

3C02-2134-01 Specifications and Compatible Tools

3C02-2134-01 operates at 2.45 GHz, delivers 150W RF power, and supports 100-250V AC voltage. Flow rate ranges 10-20 sccm for process gases. Key specs include a 50-ohm impedance match and 100°C maximum operating temperature. Compatible tools include Hitachi High-Tech ECR-1000 (2015-2020), ECR-2000 (2018-2022), and ECR-3000 (2020-2024). Units from 2015-2020 are most common, but 2021-2024 models may have updated RF connectors. Avoid using 3C02-2134-01 with 3C02-2135-02, as they share incompatible power distribution boards. Verify tool model year and RF connector type before procurement.

What to Check Before Buying a Used 3C02-2134-01 in 2026

RF-hour count: Reject units with >40,000 RF-hours unless they’ve undergone full recalibration.
Impedance test: Use a vector network analyzer (VNA) to confirm 50-ohm match within ±2 ohms.
RF leakage: Measure with a spectrum analyzer; leakage must stay below -60 dBm at 2.45 GHz.
Connector integrity: Inspect RF connectors for cracks or oxidation; replace if wear exceeds 10% of surface area.
Lifecycle year: Ensure the unit was manufactured between 2015-2020; 2021-2024 models may lack compatible spare parts.

FAQ

Q: Is the 3C02-2134-01 compatible with the ECR-1000?
A: Yes, 3C02-2134-01 is designed for ECR-1000 systems (2015-2020 models). Verify the tool’s RF connector type before installation.

Q: How does the used 3C02-2134-01 compare to the refurbished version?
A: Used units save 50-70% vs new OEM, but refurbished versions include factory recalibration and warranty. Used units may have >40,000 RF-hours, while refurbished units are typically <30,000.

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