Hitachi High-Tech 3C02-2134-01 ICP Antenna Assembly — Used

Name: Hitachi High-Tech 3C02-2134-01 ICP Antenna Assembly — Used
Brand: Hitachi High-Tech
SKU: 3C02-2134-01
Price: 1006 USD
Availability: InStock

Part No. 3C02-2134-01

Market Price

→ Stable

2 active listings

From $1K

Typical secondary market pricing · USD

Low $1,006Avg $1,006High $1,006

Save 50-70% vs OEM new

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Last verified: 2026-05-16

Request Quote · $1K – $1K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Market Data

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How much does a used Hitachi High-Tech 3C02-2134-01 ICP Antenna Assembly — Used cost in 2026?

A used Hitachi High-Tech 3C02-2134-01 ICP Antenna Assembly — Used from Hitachi High-Tech typically sells for $1k – $1k on the secondary market in 2026. That's a savings of 50-70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Hitachi High-Tech RF / Plasma Source vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 50-70% vs. new OEM

✓Lead time: 2-4 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Hitachi High-Tech 3C02-2134-01 ICP Antenna Assembly — Used from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2-4 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does 3C02-2134-01 Cost in 2026?

Used 3C02-2134-01 units in 2026 range from $1,200 to $1,500, while refurbished units command $1,800 to $2,200. New OEM list price for 3C02-2134-01 is $4,000, so used units save 50-70% compared to new. Units with >40,000 RF-hours are typically discounted further, but may show wear on RF connectors. Availability is sourcing, with lead times of 2-4 weeks after sourcing. Price variance depends on RF-hour count, tool model compatibility, and regional demand. For example, 3C02-2134-01 units from 2015-2020 ECR-1000 systems trade at higher premiums. Buyers should verify RF-hour logs and condition codes before purchase. 2026 market trends show stable pricing, but lead times may extend during peak semiconductor demand.

3C02-2134-01 Specifications and Compatible Tools

3C02-2134-01 operates at 2.45 GHz, delivers 150W RF power, and supports 100-250V AC voltage. Flow rate ranges 10-20 sccm for process gases. Key specs include a 50-ohm impedance match and 100°C maximum operating temperature. Compatible tools include Hitachi High-Tech ECR-1000 (2015-2020), ECR-2000 (2018-2022), and ECR-3000 (2020-2024). Units from 2015-2020 are most common, but 2021-2024 models may have updated RF connectors. Avoid using 3C02-2134-01 with 3C02-2135-02, as they share incompatible power distribution boards. Verify tool model year and RF connector type before procurement.

What to Check Before Buying a Used 3C02-2134-01 in 2026

RF-hour count: Reject units with >40,000 RF-hours unless they’ve undergone full recalibration.
Impedance test: Use a vector network analyzer (VNA) to confirm 50-ohm match within ±2 ohms.
RF leakage: Measure with a spectrum analyzer; leakage must stay below -60 dBm at 2.45 GHz.
Connector integrity: Inspect RF connectors for cracks or oxidation; replace if wear exceeds 10% of surface area.
Lifecycle year: Ensure the unit was manufactured between 2015-2020; 2021-2024 models may lack compatible spare parts.

FAQ

Q: Is the 3C02-2134-01 compatible with the ECR-1000?
A: Yes, 3C02-2134-01 is designed for ECR-1000 systems (2015-2020 models). Verify the tool’s RF connector type before installation.

Q: How does the used 3C02-2134-01 compare to the refurbished version?
A: Used units save 50-70% vs new OEM, but refurbished versions include factory recalibration and warranty. Used units may have >40,000 RF-hours, while refurbished units are typically <30,000.

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