3C02-4521-01 — SEM Column Aperture Assembly (CG5000) (Hitachi High-Tech)

Name: 3C02-4521-01 — SEM Column Aperture Assembly (CG5000) (Hitachi High-Tech)
Brand: Hitachi High-Tech
SKU: 3C02-4521-01
Price: 1006 USD
Availability: InStock

Part No. 3C02-4521-01

Market Price

→ Stable

2 active listings

From $1K

Typical secondary market pricing · USD

Low $1,006Avg $1,006High $1,006

Save 50-70% vs OEM new

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Last verified: 2026-05-16

Request Quote · $1K – $1K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

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How much does a used 3C02-4521-01 — SEM Column Aperture Assembly (CG5000) (Hitachi High-Tech) cost in 2026?

A used 3C02-4521-01 — SEM Column Aperture Assembly (CG5000) (Hitachi High-Tech) from Hitachi High-Tech typically sells for $1k – $1k on the secondary market in 2026. That's a savings of 50-70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Hitachi High-Tech Parts & Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 50-70% vs. new OEM

✓Lead time: 2-4 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used 3C02-4521-01 — SEM Column Aperture Assembly (CG5000) (Hitachi High-Tech) from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2-4 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does 3C02-4521-01 Cost in 2026?

As of May 2026, used 3C02-4521-01 assemblies range from $5,000–$8,000, while refurbished units (with new seals and vacuum coatings) cost $8,000–$12,000. New OEM units exceed $25,000, making used/refurbished options 50–70% cheaper. Price variance correlates with installation history—units with >40,000 RF-hours often command a 10–15% premium due to higher wear. Refurbishment typically includes vacuum seal replacement, aperture plate resurfacing, and beam alignment recalibration. Buyers should verify installation logs for prior exposure to aggressive etch chemistries (e.g., CF₄/O₂), which accelerate aperture degradation. Units sourced from 2018–2020 installations are most common in the secondary market.

3C02-4521-01 Specifications and Compatible Tools

The 3C02-4521-01 is a 100-micron diameter aperture assembly rated for 5–30 kV operation in Hitachi CG5000 and CD-SEM 9500/9600 systems. It features a molybdenum-niobium alloy plate with a 0.1-µm surface finish and a 1.5e-8 mbar helium leak rate. Compatible with Hitachi CG5000 (2000–2015) and CD-SEM 9500 (2005–2012) models. Warning: Do not install in systems requiring 3C02-4521-02 (larger 150-µm aperture), as mismatched apertures cause beam instability. Verify tool firmware version 3.2+ for compatibility with 2026-era refurbished units. OEM specifies 12-month replacement cycles in high-throughput environments.

What to Check Before Buying a Used 3C02-4521-01 in 2026

Aperture Diameter Tolerance: Measure with a laser interferometer—deviation >±1 µm indicates beam drift risks.
Surface Pitting: Use a profilometer to confirm pitting depth <0.1 mm (exceeding this reduces vacuum integrity).
Vacuum Seal Test: Perform a helium leak test at 1.5e-8 mbar; failure indicates seal degradation.
Installation History: Reject units installed before 2018 (likely >50,000 cycles).
Beam Signal Strength: Test at 5 kV with a Faraday cup—<90% signal retention vs. OEM spec is a red flag.
Request prior maintenance logs for evidence of chemical exposure (e.g., plasma etch residues). Inspect O-rings for brittleness using a durometer (acceptable Shore A hardness: 70–80).

Q: Is 3C02-4521-01 OEM vs used/refurbished interchangeable?
A: No. OEM units include factory calibration certificates; used/refurbished parts require re-calibration post-installation.

Q: Compatible with Hitachi CD-SEM 9500?
A: Yes