3C02-4521-01 — SEM Column Aperture Assembly (CG5000) (Hitachi High-Tech)

Name: 3C02-4521-01 — SEM Column Aperture Assembly (CG5000) (Hitachi High-Tech)
Brand: Hitachi High-Tech
SKU: 3C02-4521-01

Part No. 3C02-4521-01

Market Price

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Available by Request

Last verified: 2026-05-16

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for 3C02-4521-01 — SEM Column Aperture Assembly (CG5000) (Hitachi High-Tech) moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used 3C02-4521-01 — SEM Column Aperture Assembly (CG5000) (Hitachi High-Tech) cost in 2026?

Pricing for used 3C02-4521-01 — SEM Column Aperture Assembly (CG5000) (Hitachi High-Tech) units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Hitachi High-Tech Parts & Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used 3C02-4521-01 — SEM Column Aperture Assembly (CG5000) (Hitachi High-Tech) from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

3C02-4521-01 Specifications and Compatible Tools

The 3C02-4521-01 is a 100-micron diameter aperture assembly rated for 5–30 kV operation in Hitachi CG5000 and CD-SEM 9500/9600 systems. It features a molybdenum-niobium alloy plate with a 0.1-µm surface finish and a 1.5e-8 mbar helium leak rate. Compatible with Hitachi CG5000 (2000–2015) and CD-SEM 9500 (2005–2012) models. Warning: Do not install in systems requiring 3C02-4521-02 (larger 150-µm aperture), as mismatched apertures cause beam instability. Verify tool firmware version 3.2+ for compatibility with 2026-era refurbished units. OEM specifies 12-month replacement cycles in high-throughput environments.

What to Check Before Buying a Used 3C02-4521-01 in 2026

Aperture Diameter Tolerance: Measure with a laser interferometer—deviation >±1 µm indicates beam drift risks.
Surface Pitting: Use a profilometer to confirm pitting depth <0.1 mm (exceeding this reduces vacuum integrity).
Vacuum Seal Test: Perform a helium leak test at 1.5e-8 mbar; failure indicates seal degradation.
Installation History: Reject units installed before 2018 (likely >50,000 cycles).
Beam Signal Strength: Test at 5 kV with a Faraday cup—<90% signal retention vs. OEM spec is a red flag.
Request prior maintenance logs for evidence of chemical exposure (e.g., plasma etch residues). Inspect O-rings for brittleness using a durometer (acceptable Shore A hardness: 70–80).

Q: Is 3C02-4521-01 OEM vs used/refurbished interchangeable?
A: No. OEM units include factory calibration certificates; used/refurbished parts require re-calibration post-installation.

Q: Compatible with Hitachi CD-SEM 9500?
A: Yes