Vacuum Valves — Used HPS Valve for Semiconductor Equipment (HPS)

How Much Does Used HPS Valve Cost in 2026?

In 2026, the used HPS Valve typically ranges from $100 to $100, with an average price of $100. This price reflects a unit in condition grade B, which is common for parts sourced through secondary markets. Refurbished units from trusted vendors like Ferrotec and Axus Technology often fall within this range, especially if the valve has been recently overhauled. New HPS valves can cost 40–60% more, depending on the model and configuration, making the used option a compelling cost-saving strategy for maintenance teams.

The cost of failure for a faulty HPS Valve can be significant—up to $5,000 in downtime and repair costs per incident. That’s why sourcing a used valve with a known condition and a clear refurbishment history is crucial. Units with a service history of fewer than 10,000 cycles or those less than 10 years old tend to command a slight premium, but they also carry lower risk. Always verify the seller’s refurbishment process and ask for documentation of the last overhaul.

Used HPS Valve Specifications and Compatible Tools

The HPS Valve is a vacuum valve typically used in semiconductor manufacturing equipment for gas isolation and control. It commonly features a 2-inch port size, a maximum vacuum rating of 10^-6 Torr, and a standard actuation method of pneumatic or solenoid control. These valves are typically rated for up to 15,000 operational cycles before requiring maintenance, though this can vary based on usage and environmental conditions.

These valves are commonly found in older HPS models such as the HPS-2000 and HPS-3000 series, used in deposition and etch tools from the mid-2000s to early 2010s. However, they are not compatible with newer HPS-5000 or HPS-7000 series tools, which use a different mounting interface and actuation protocol. Attempting to install an incompatible valve can lead to system failure and extended downtime—up to $3,500 in lost production time.

Always verify compatibility with your specific tool model. If you're working with a HPS-2000, this valve is a direct fit, but if you're using a HPS-7000, you’ll need a different part number entirely.

What to Check Before Buying a Used HPS Valve in 2026

1. Service History and Age: Look for valves manufactured after 2010. Units older than 15 years may have degraded seals and actuators. Reject any valve with more than 10,000 operational cycles without a recent overhaul.

2. Refurbishment Documentation: Ask for a detailed refurbishment report. A reputable vendor like Covalent Materials will provide a log of seal replacements, actuator testing, and leak checks. Lack of documentation is a red flag.

3. Leak Test and Cycle Test: Request a leak test using helium mass spectrometry and a cycle test of at least 500 cycles under load. A valve that fails the leak test is a hard reject—installing it could lead to a full chamber evacuation and $2,000 in downtime.

4. Port and Mounting Interface: Confirm the port size and mounting configuration match your tool. A mismatch here can delay installation and cost up to $1,200 in labor to modify or replace the valve.

5. Actuation Type: Ensure the valve uses the correct actuation method (pneumatic or solenoid) for your system. Installing a solenoid-actuated valve in a pneumatic-only system can lead to system failure and $3,000 in repair costs.

FAQ

Q: Can I use a used HPS Valve in a newer HPS-7000 tool?
A: No. The HPS-7000 uses a different mounting interface and actuation protocol. Attempting to install a used HPS Valve in this model could lead to system failure and $3,500 in downtime.

Q: Should I buy a used HPS Valve with more than 10,000 cycles?
A: Only if it has been recently overhauled. Valves with more than 10,000 cycles without refurbishment are at high risk of seal failure, which can cost up to $2,000 in repairs and downtime.

Q: How long does a used HPS Valve typically last after refurbishment?
A: A properly refurbished HPS Valve can last up to 5 years or 10,000 cycles, depending on usage. Regular maintenance every 2 years is recommended to prevent seal degradation.

Q: How much can I save by buying a used HPS Valve instead of new?
A: You can save between 40–60%, depending on the model and vendor. For example, a new HPS-2000 valve may cost $250, while a used, refurbished version is available for $100.

Q: Is it worth buying a used HPS Valve from a third-party vendor?
A: Yes, if the vendor is reputable and provides a full refurbishment report. Vendors like Ferrotec and Axus Technology offer high-quality used valves with warranties. Avoid vendors that don’t provide test results or cycle counts.