Novellus Novellus System 95983 R Injector Tube 571 Cvd Reseller Lot O — Injector Tube for 571 CVD System (Novellus)

How Much Does Novellus System 95983-R Injector Tube 571 CVD Reseller Lot of 8 Cost in 2026?

As of July 2026, the Novellus System 95983-R Injector Tube 571 CVD Reseller Lot of 8 is priced at $252 per unit, with the entire lot of 8 costing around $2,016. This price is for a used, refurbished unit in condition grade B. If you're looking for a higher-grade unit (A or A+), you can expect to pay between $300–$350 per piece, depending on the vendor and the unit's condition. New units from Novellus or authorized resellers typically range from $500–$600 each, meaning you can save between 40–60% by purchasing a used or refurbished option.

Reputable refurb vendors like Ferrotec and Axus Technology often carry these parts, and they typically offer a 6–12 month warranty on their refurbished units. The cost of failure is significant: a failed injector tube can lead to process contamination, requiring a full chamber clean and potentially causing $10,000–$15,000 in downtime costs. Units with more than 10,000 RF hours or visible corrosion should be avoided, as they are more likely to fail prematurely.

Novellus System 95983-R Injector Tube 571 CVD Reseller Lot of 8 Specifications and Compatible Tools

The Novellus 95983-R Injector Tube is a critical component in the 571 CVD system, used to deliver process gases into the deposition chamber. It is typically constructed from quartz or ceramic and is designed to withstand high temperatures and corrosive environments. These tubes are commonly rated for up to 12,000 RF hours, though actual lifespan can vary based on process conditions and maintenance.

This part is compatible with Novellus 571 CVD systems manufactured between 2003 and 2008. It is not compatible with later models such as the 571XP or 571X, which use part number 95983-1. Using the wrong part can lead to gas flow irregularities and process instability, which may result in defective wafers and an average loss of $8,000–$12,000 per incident.

Verify compatibility with your specific tool model and production year. If in doubt, consult the tool’s maintenance manual or contact the seller for confirmation.

What to Check Before Buying a Used Novellus System 95983-R Injector Tube 571 CVD Reseller Lot of 8 in 2026

1. RF Hours and Age: Units with more than 10,000 RF hours or over 10 years old should be inspected closely. These are more prone to internal degradation and failure.

2. Visual Inspection for Cracks or Corrosion: Use a 10x magnifier to check for micro-cracks or pitting. Reject any unit with visible damage.

3. Gas Flow Test: Perform a flow test using a calibrated mass flow controller. A deviation of more than 5% from the expected flow rate indicates a potential issue.

4. Leak Test: Use a helium mass spectrometer to check for leaks. A leak rate above 1 x 10^-8 mbar·L/s is a hard reject.

5. Warranty and Seller Reputation: Ensure the unit comes with a 6–12 month warranty and is from a known refurb vendor. Units without a clear production year or refurb history should be avoided.

Failing to inspect a used injector tube can lead to process failures, downtime, and costly rework. A single failure can cost between $10,000–$15,000 in lost production and repair costs.

FAQ

Q: Can I use a Novellus 95983-R Injector Tube in a 571XP system?
A: No. The 571XP system uses part number 95983-1. Using the wrong part can cause gas flow issues and process instability, which may cost $8,000–$12,000 in defective wafers.

Q: Should I buy a used injector tube with 11,000 RF hours?
A: No. Units with more than 10,000 RF hours are at higher risk of failure. A premature failure could cost $10,000–$15,000 in downtime and rework.

Q: How long does a Novellus 95983-R Injector Tube typically last?
A: These tubes typically last between 8,000–12,000 RF hours, depending on process conditions and maintenance. Replace them if you notice a 5% or greater deviation in gas flow.

Q: What’s the difference between a used and a refurbished injector tube?
A: A used tube is sold as-is, while a refurbished unit has been tested and repaired by a certified vendor. Refurbished units from Ferrotec or Axus Technology often include a 6–12 month warranty and cost 10–20% more than used units.

Q: Is it worth buying a lot of 8 injector tubes at once?
A: Yes, if you're running a high-volume CVD process. Buying in bulk can reduce per-unit costs and ensure you have spares on hand, which can save $5,000–$7,000 in emergency replacement costs.