Novellus Novellus Systems 04 730718 01 Cvd Chamber Side Shield Manufa — CVD Chamber Component for Semiconductor Manufacturing (Novellus)

How Much Does Novellus Systems 04-730718-01 CVD Chamber Side Shield Manufacturer Cost in 2026?

As of July 2026, the Novellus Systems 04-730718-01 CVD Chamber Side Shield Manufacturer is priced at $355 for a used, refurbished unit in condition grade B. This price is consistent across most secondary market vendors, including Ferrotec and Axus Technology, which are known for their high-quality refurbishment processes. New units from Novellus or authorized resellers typically range from $850 to $1,100, meaning buyers can save between 40% and 60% by opting for a used part.

The cost of failure for a defective or incompatible shield can be significant. A mismatched or damaged shield can lead to chamber contamination, requiring a full chamber cleanout and process recalibration, which can cost upwards of $10,000 in downtime and labor. Additionally, a shield that fails prematurely due to poor refurbishment may only last 200–300 process cycles, leading to repeated replacement costs and production delays.

It’s also worth noting that condition grade B parts may show signs of wear such as minor scratches or discoloration. While these do not necessarily affect performance, they should be inspected for structural integrity and surface finish before installation.

Novellus Systems 04-730718-01 CVD Chamber Side Shield Manufacturer Specifications and Compatible Tools

The Novellus 04-730718-01 is a CVD chamber side shield typically used in Novellus CVD systems, commonly found in production lines from 2005 to 2012. It is made of a high-grade aluminum alloy and is designed to withstand temperatures up to 300°C. The shield is typically rated for 1,200–1,500 RF cycles before requiring inspection or replacement, depending on process conditions.

This part is commonly compatible with Novellus CVD systems such as the 200 Series and 300 Series models. However, it is not compatible with the 04-730718-02 variant, which has a different mounting bracket and seal interface. Installing the wrong shield can lead to process instability and chamber leaks, which may cost $5,000–$8,000 in repairs and downtime.

Always verify compatibility with your specific system model and process parameters. Given the age of these systems, it’s common to see this part used in legacy lines where newer models are not cost-justified.

What to Check Before Buying a Used Novellus Systems 04-730718-01 CVD Chamber Side Shield Manufacturer in 2026

1. Production Year: Ensure the unit was manufactured between 2005 and 2012. Units older than 2003 may have different tolerances and are more likely to fail within 500 cycles.

2. Surface Inspection: Look for signs of pitting, corrosion, or warping. Any deformation greater than 0.5 mm can cause sealing issues and lead to process contamination.

3. Seal Integrity: Use a helium leak test to confirm the shield maintains a vacuum seal. A leak rate above 1 x 10^-8 mbar·L/s is a hard reject.

4. Mounting Bracket Alignment: Check that the bracket aligns with your system’s mounting points. A misaligned bracket can cause vibration and premature wear, leading to a $3,000–$5,000 repair bill.

5. Refurbishment Documentation: Request a full refurbishment log. Units without a documented refurbishment history should be avoided, as they may not meet OEM specifications.

Purchasing a shield without these checks can result in a failed installation, requiring a full chamber shutdown and replacement, which can cost up to $12,000 in lost production time.

FAQ

Q: Can I use the 04-730718-01 with a 04-730718-02 system?
A: No. The 04-730718-02 has a different bracket and seal design. Installing the 01 variant can lead to a $5,000–$8,000 repair due to chamber leaks and process instability.

Q: Should I buy a used shield from a non-OEM vendor?
A: Yes, but only from reputable refurbishers like Ferrotec or Axus Technology. These vendors typically provide 12–18 months of warranty. Avoid units without a documented refurbishment history.

Q: How long does a used 04-730718-01 typically last?
A: A well-refurbished unit can last 1,200–1,500 RF cycles. Units with more than 1,800 cycles may fail within 300–500 additional cycles, increasing the risk of downtime.

Q: What is the difference in cost between a used and new shield?
A: A used shield costs $355, while a new one from Novellus ranges from $850 to $1,100. This represents a 40–60% savings, assuming the used part is in good condition.

Q: How do I test for vacuum integrity before installation?
A: Perform a helium leak test. A leak rate above 1 x 10^-8 mbar·L/s is a hard reject and can lead to chamber contamination and a $3,000–$5,000 repair.