Novellus Novellus Systems 95984 R Injector Tube Sti Cvd Reseller Lot — Injector Tube for STI CVD Processes (Novellus)

How Much Does Novellus Systems 95984-R Injector Tube STI CVD Reseller Lot of 5 Cost in 2026?

As of July 2026, the Novellus Systems 95984-R Injector Tube STI CVD Reseller Lot of 5 is priced at $252 per unit, with the entire lot typically offered at a flat rate. This price is typically for a used, refurbished unit in condition grade B. If you're looking for a higher-grade unit (A or A+), expect to pay between $300–$350 per unit, depending on the vendor. New units from Novellus or authorized resellers are generally priced around $600–$700 per piece, meaning you can save between 40–60% by purchasing a used or refurbished version.

Refurbished units are commonly sourced from vendors like Ferrotec and Axus Technology, both of which have a strong track record in semiconductor equipment refurbishment. These vendors typically offer 12–18 months of warranty on their refurbished parts, which is a key consideration for maintenance teams looking to avoid unplanned downtime.

If you purchase a faulty or low-quality unit, the cost of failure can be significant. A failed injector tube can lead to process instability, requiring up to 24–48 hours of downtime for replacement and recalibration. In a high-volume fab, this can cost upwards of $10,000 in lost production. Always ensure the unit has been tested for gas flow and pressure integrity before installation.

Novellus Systems 95984-R Injector Tube STI CVD Reseller Lot of 5 Specifications and Compatible Tools

The Novellus Systems 95984-R Injector Tube is a critical component in Shallow Trench Isolation (STI) Chemical Vapor Deposition (CVD) systems. It is typically used in Novellus’ Producer 300 series tools, particularly models from the 2005–2010 production window. The tube is designed to handle process gases under high pressure and temperature, commonly operating at 300–400°C and up to 10 Torr.

Key specifications include a typical length of 18–20 inches, a bore diameter of 0.5 inches, and a wall thickness of 0.05–0.07 inches. The material is typically quartz or ceramic, depending on the process chemistry. The lifecycle of the injector tube is typically measured in RF-hours, with most units needing replacement after 500–700 hours of operation.

This part is not compatible with the Novellus 95984-L model, which has a different internal geometry and gas flow path. Using an incompatible injector tube can lead to gas leakage, uneven deposition, and potential chamber contamination. In the worst case, this can cause a complete process failure and require a full chamber clean, costing $8,000–$12,000 in downtime and materials.

What to Check Before Buying a Used Novellus Systems 95984-R Injector Tube STI CVD Reseller Lot of 5 in 2026

1. Verify Production Year: Units produced before 2008 may have a different internal coating, which can affect gas flow and deposition uniformity. Reject any unit older than 2006.

2. Check for Cracks or Delamination: Use a high-resolution borescope to inspect the inner surface. Reject the unit if any cracks or delamination are visible, as this can lead to gas leakage and process instability.

3. Perform a Pressure Integrity Test: This is a standard test method used by refurb vendors. The tube should hold 10 Torr for at least 10 minutes without a drop in pressure. A drop of more than 1 Torr is a hard reject.

4. Confirm RF-Hour Usage: Units with more than 700 RF-hours are typically past their useful life. Ask the seller for a log or certificate of use. If unavailable, assume the unit is at high risk of failure.

5. Request a Gas Flow Test Report: This test measures the uniformity of gas distribution. A deviation of more than 10% from the baseline is a red flag and may indicate internal blockage or wear.

Failing to follow these steps can result in a unit that fails within 100–200 hours of operation, leading to costly downtime and rework.

FAQ

Q: Can I use a Novellus 95984-R Injector Tube in a Producer 300 model from 2004?
A: No. The 2004 models use a different internal gas path and are not compatible with the 95984-R. Using it could cause gas leakage and require a full chamber clean, costing up to $10,000 in downtime.

Q: Should I buy a used Novellus 95984-R Injector Tube with 800 RF-hours?
A: No. Units with more than 700 RF-hours are typically past their useful life and are at high risk of failure within 50–100 hours of operation.

Q: How long does a Novellus 95984-R Injector Tube typically last?
A: On average, the tube lasts 500–700 RF-hours. After that, performance degrades, and the risk of failure increases significantly.

Q: What’s the difference between a Novellus 95984-R and a 95984-L Injector Tube?
A: The 95984-L has a different internal geometry and gas flow path. Using the wrong model can lead to process instability and require a full chamber clean, costing $8,000–$12,000.

Q: Is it worth buying a used Novellus 95984-R Injector Tube from a non-certified vendor?
A: Only if the vendor can provide a full refurb log, pressure test report, and gas flow test. Otherwise, the risk of failure is too high, and the cost of downtime could exceed the savings.