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Novellus Systems (acquired by Lam Research)

Novellus Sequel CVD System

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Novellus Systems (acquired by Lam Research)

Novellus Sequel CVD System

Market Price

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✓Tested & inspected
✓Documentation included
✓Fast worldwide shipping
✓30-day functional warranty
✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Novellus Sequel CVD System moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

How much does a used Novellus Sequel CVD System cost in 2026?

Pricing for used Novellus Sequel CVD System units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Novellus Systems (acquired by Lam Research) Chemical Vapor Deposition (CVD) vs. buying new: is it worth it in 2026?

Used (2026)
✓Priced below new OEM
✓Inspected and functionally tested before shipment
✓30-day functional warranty
New OEM
—Full OEM list price
—Factory lead times apply
—New condition, full warranty
—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Novellus Sequel CVD System from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

  • ✓Functional test report and inspection photos
  • ✓Available documentation (manuals, service records where available)
  • ✓Availability: Available to Source — contact for current inventory
  • ✓Export compliance documentation (EAR99 or ECCN classification provided)

Novellus Sequel CVD System Specifications and Compatible Tools

Operates at 10–500 mTorr chamber pressure, 13.56 MHz RF frequency, and 300–450°C susceptor temperature. Gas flow capacity: 5–500 sccm for SiH₄/NH₃ precursors. Compatible with:

  • Applied Materials 300mm PECVD (models 5500/6500, 1998–2005)
  • Lam Centura DSiE (models 2330/2350, 2000–2007)
  • Tokyo Electron ULV-2000 (1999–2003) with adapter kit
    Exclusion: Not compatible with Tokyo Electron VECTOR F120 (Part #TE-VEC-F120-01) due to incompatible gas manifold interfaces.

What to Check Before Buying a Used Novellus Sequel CVD System in 2026

  1. Process Cycle Count: Reject units with >15,000 cycles; plasma liners and electrodes degrade past 12,000.
  2. RF Uniformity Test: Use a vector network analyzer (VNA) to measure ±5% deviation at 13.56

Recent Market Listings

Updated Sep 30

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Related Parts

Quick Info

ConditionUsed
CategoryChemical Vapor Deposition (CVD)

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