Tokyo Electron Limited (TEL)
TEL Trias CVD System
Tokyo Electron Limited (TEL)
TEL Trias CVD System
Market Price
→ Stable$150K–$450K
Typical secondary market pricing · USD
Aggregated from secondary market sources · Not a guaranteed offer
Talk to a specialist · parts@caladansemi.com
Market Data
Coming Soon for TEL Trias CVD System
Price history and market activity data is being compiled.
How much does a used TEL Trias CVD System cost in 2026?
A used TEL Trias CVD System from Tokyo Electron Limited (TEL) typically sells for $150k – $450k on the secondary market in 2026. That's a savings of 40–70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.
Used Tokyo Electron Limited (TEL) Chemical Vapor Deposition (CVD) vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used TEL Trias CVD System from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Grade B — good working condition, normal wear
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Estimated lead time: 2–6 weeks after sourcing confirmation
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
How Much Does TEL Trias CVD System Cost in 2026?
Used systems priced between $1.2M–$1.8M in 2026, depending on process cycle count and chamber condition. Refurbished units (with OEM-certified upgrades) average $2.1M–$2.4M, saving 35–45% vs new. Systems with <5,000 process cycles command a 20% premium due to extended lifecycle. Savings vs new (priced $3.2M–$3.6M) hinge on tool history: units with documented preventive maintenance logs reduce risk premiums by 15–25%. Caveat: Systems exceeding 10,000 cycles without major refurbishment may incur 10–15% devaluation during valuation audits.
TEL Trias CVD System Specifications and Compatible Tools
Operates at 1–200 mTorr chamber pressure, 1–5 kW RF power (13.56 MHz), and 100–500 sccm gas flow rates. Deposits SiN/SiO₂ films at 5–50 nm/min with ±3% uniformity. Compatible with TEL P5000 (2008–2014), P7000 (2012–2017), and Hitachi HCP-5000 (2010–2015) cluster tools. Requires TEL’s proprietary ECR-3000 plasma source (PN: TEL-ECR-3000A). Exclusion: Incompatible with Lam Research Centura platforms without custom adapter kits (PN: TEL-ADP-TRIAS-LAM). Verify RF matching network compatibility for 2015+ Trias variants.
What to Check Before Buying a Used TEL Trias CVD System in 2026
- Chamber wall erosion: Measure thickness via ultrasonic gauge; reject if <0.8mm below OEM spec (1.2mm nominal).
- RF generator stability: Test output with oscilloscope; ±5% deviation from 13.56 MHz is acceptable.
- Gas line integrity: Perform helium leak test; >1×10⁻⁶ mbar·L/s indicates seal failure.
- Process cycle count: Cross-reference logs with PLC data; systems >12,000 cycles require pump refurbishment.
- Heating element uniformity: Use thermocouple array; ±5°C variance across wafer is max.
Prioritize units with <8,000 cycles and documented 2021–2023 PM records to avoid costly upgrades.
FAQ
**Q: Does the Trias CVD support
Recent Market Listings
Updated May 19$127,500
As-is$240,000
Used$360,000
Refurbished| Type | Price | Condition | Date |
|---|---|---|---|
| Ask | $127,500 | As-is | May 12, 2026 |
| Ask | $240,000 | Used | May 5, 2026 |
| Ask | $360,000 | Refurbished | Apr 28, 2026 |
Place a bid · Prices update daily
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Quick Info
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Market: $150K – $450K
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