SUSS MicroTec SB6e Wafer Bonder | Buying Checks

What to match before buying an SB6e

The SUSS MicroTec SB6e is a semi-automatic wafer bonder for substrates up to 150 mm; the paired SB8e model is described separately for 200 mm wafers.

For a used purchase, ask for the serial number and an itemized configuration before comparing offers. Have your process engineer specify the substrate pair, wafer diameter, stack thickness, bond method and required alignment result. Request evidence for the offered machine, not just a family brochure.

• Tooling: Request photographs and part numbers for the installed chucks, loading fixture and any alignment-transfer hardware. Compare them with your intended substrate stack.
• Process options: Ask which bonding processes the offered configuration has demonstrated, and request its option list, manuals and recent recipe records.
• Controls and utilities: Obtain software versions, access requirements and the serial-specific installation checklist. Assign responsibility for setup and calibration before purchase.

Agree on acceptance before shipment

Write a witnessed acceptance plan around your own sample stack. Specify how to measure post-bond alignment, bond quality and repeatability, and agree on pass/fail limits with your engineer and the seller. Request the raw results, sample identification, recipe, calibration dates and any exceptions.

Include checks of chamber operation, heating, applied force and safety interlocks using the approved service procedure. Ask for a complete accessories inventory and a record of dismantling and packing. Put responsibility for installation and a repeat acceptance run at your site in the purchase terms.

What to include in an SB6e quote request

Send your target process, wafer size, required fixtures, destination and acceptance plan. Ask the seller to separate the machine, tooling, inspection, packing, freight and installation costs. Obtain written condition, warranty, availability and dispatch terms for the identified serial number.

Buyer questions

Does an SB6e listing prove it can run my process?

Require the installed-option record and a sample run against your acceptance plan before treating the offer as a process match.

Should I accept an SB6 or SB8e as a substitute?

Keep any alternative model as a separate engineering review. Do not approve a substitution from a similar model name alone.

Related buying resources

• Used wafer bonder buying guide
• SB6 catalog page for separate model research
• Equipment inspection checklist