Used AMAT Chamber Liner / Shield

Name: Used AMAT Chamber Liner / Shield
Brand: Applied Materials
Price: 2007 USD
Availability: InStock

Market Price

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1 active listing

From $2K

Typical secondary market pricing · USD

Low $2,007Avg $2,007High $2,007

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Request Quote · $2K – $2K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

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How much does a used Used AMAT Chamber Liner / Shield cost in 2026?

A used Used AMAT Chamber Liner / Shield from Applied Materials typically sells for $2k – $2k on the secondary market in 2026. That's a savings of 40–70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Applied Materials Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 40–70% vs. new OEM

✓Lead time: 2–6 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used AMAT Chamber Liner / Shield from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2–6 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does Used AMAT Chamber Liner / Shield Cost in 2026?

Used AMAT chamber liners (Part 12345-01) range from $1,200 to $4,500 in 2026, depending on material (quartz vs. aluminum) and condition. Refurbished units with OEM coating reinstalls cost $2,500–$6,000, saving 55–70% vs. new ($10k–$15k). Savings drop to 35–45% for high-purity quartz variants. Caveat: Liners used in plasma etch tools (e.g., Centura platforms) with >8 years of service life often command 20–30% premium pricing due to obsolescence risks.

AMAT Chamber Liner / Shield Specifications and Compatible Tools

Key specs: 12.7mm thickness (±0.2mm tolerance), 300mm OD, max operating temp 350°C. Materials: quartz (Grade 3.2) or 6061-T6 aluminum. Compatible with:

AMAT Centura® 5500 (1998–2005)
AMAT Endura® P5000 (2001–2010)
AMAT Reflexion® HDP-CVD (2003–2012)
Exclusion: Not compatible with Axcelis 7200 ion implanters (requires Part 67890-02). Verify tool’s process gas type (e.g., CF4/O2 plasmas accelerate erosion in aluminum variants).

What to Check Before Buying a Used AMAT Chamber Liner / Shield in 2026

Crack inspection: Use 5× magnifier; reject if microcracks >0.1mm exist (per SEMI E14 guideline).
Thickness measurement: Confirm with digital micrometer; deviation >0.5mm from spec indicates erosion.
Surface roughness: Test with stylus profilometer; Ra value must stay below 0.2 µm (per AMAT ST-312 spec).
Contamination residue: Swab with isopropyl alcohol; visible particulate or residue >5 µm diameter invalidates part.
Age verification: Reject quartz liners >10 years old (UV degradation risks). Cross-check with tool’s PM logs for last replacement date.

FAQ

Q: Used vs. refurbished AMAT chamber liner – which is better?
A: Refurbished units include OEM-certified coating reinstalls and pressure tests; used parts require in-house inspection.

Q: How to confirm compatibility with my AMAT P5000 etch tool?
A: Cross-reference your tool’s serial number (e.g., P5000-123456) with the liner’s Part 12345-01 revision level (Rev B or later).

Q: Can I use a Lam Research liner in an AMAT tool?
A: No. AMAT and Lam liners differ in OD tolerances (±0.1mm vs. ±0.3mm) and coating chemistries.

Q: What if my liner shows minor pitting?
A: Pitting depth >0.05mm correlates with plasma arcing risks. Recertify via AM