Used AMAT Chamber Liner / Shield

Name: Used AMAT Chamber Liner / Shield
Brand: Applied Materials

Market Price

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Available by Request

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Used AMAT Chamber Liner / Shield moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used Used AMAT Chamber Liner / Shield cost in 2026?

Pricing for used Used AMAT Chamber Liner / Shield units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Applied Materials Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used AMAT Chamber Liner / Shield from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

AMAT Chamber Liner / Shield Specifications and Compatible Tools

Key specs: 12.7mm thickness (±0.2mm tolerance), 300mm OD, max operating temp 350°C. Materials: quartz (Grade 3.2) or 6061-T6 aluminum. Compatible with:

AMAT Centura® 5500 (1998–2005)
AMAT Endura® P5000 (2001–2010)
AMAT Reflexion® HDP-CVD (2003–2012)
Exclusion: Not compatible with Axcelis 7200 ion implanters (requires Part 67890-02). Verify tool’s process gas type (e.g., CF4/O2 plasmas accelerate erosion in aluminum variants).

What to Check Before Buying a Used AMAT Chamber Liner / Shield in 2026

Crack inspection: Use 5× magnifier; reject if microcracks >0.1mm exist (per SEMI E14 guideline).
Thickness measurement: Confirm with digital micrometer; deviation >0.5mm from spec indicates erosion.
Surface roughness: Test with stylus profilometer; Ra value must stay below 0.2 µm (per AMAT ST-312 spec).
Contamination residue: Swab with isopropyl alcohol; visible particulate or residue >5 µm diameter invalidates part.
Age verification: Reject quartz liners >10 years old (UV degradation risks). Cross-check with tool’s PM logs for last replacement date.

FAQ

Q: Used vs. refurbished AMAT chamber liner – which is better?
A: Refurbished units include OEM-certified coating reinstalls and pressure tests; used parts require in-house inspection.

Q: How to confirm compatibility with my AMAT P5000 etch tool?
A: Cross-reference your tool’s serial number (e.g., P5000-123456) with the liner’s Part 12345-01 revision level (Rev B or later).

Q: Can I use a Lam Research liner in an AMAT tool?
A: No. AMAT and Lam liners differ in OD tolerances (±0.1mm vs. ±0.3mm) and coating chemistries.

Q: What if my liner shows minor pitting?
A: Pitting depth >0.05mm correlates with plasma arcing risks. Recertify via AM