Used Brooks SLA5800 Series Mass Flow Controller

Name: Used Brooks SLA5800 Series Mass Flow Controller
Brand: Brooks Instrument

Market Price

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Available by Request

Last verified: 2026-05-16

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✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Used Brooks SLA5800 Series Mass Flow Controller moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used Used Brooks SLA5800 Series Mass Flow Controller cost in 2026?

Pricing for used Used Brooks SLA5800 Series Mass Flow Controller units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Brooks Instrument Subassemblies vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used Brooks SLA5800 Series Mass Flow Controller from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

Specifications and Compatible Tools

The Brooks SLA5800 operates on 120VAC, 60Hz, with a flow range of 0.01–100 sccm (standard) or 0.001–1000 sccm (high-precision). It supports 0.1% full-scale accuracy and ±0.5% repeatability. Compatible tools include Applied Materials PLT-100 (2015–2018), Lam Research PECVD-500 (2016–2019), and Tokyo Electron E-1000 (2017–2020). Avoid using the SLA5800 with Brooks SLA5800-100 in dual-channel configurations; this combination causes signal interference. Always verify compatibility with the tool’s OEM documentation. 2026 models may lack support for newer protocols like Modbus TCP/IP, requiring firmware updates.

What to Check Before Buying a Used in 2026

Verify RF-hour count: Reject units with >80,000 RF-hours unless they’ve undergone a full recalibration. 2026 buyers should prioritize units with <50,000 RF-hours for optimal performance.
Test voltage output: Use a multimeter to confirm 120VAC ±5% at the controller’s power input. Deviations indicate potential circuit board failure.
Calibrate against a known standard: Use a Brooks SLA5800-500 as a reference or a NIST-traceable flow standard. Acceptable deviation: ±0.3%.
Inspect for leaks: Apply helium leak detection to all ports; acceptable leakage rate: <1×10⁻⁶ SCCM.
Check model year: 2026 buyers should avoid units from 2012–2014, as these lack modern diagnostic features.

FAQ

Q: What’s the price range for a used SLA5800 in 2026?
A: 2026 market conditions favor units with <50,000 RF-hours.

Q: How does the SLA5800 compare to the SLA5800-100?
A: The SLA5800 offers 0.01–100 sccm range, while the SLA5800-100 extends to 0.001–1000 sccm. The SLA5800 is better suited for standard semiconductor processes, whereas the SLA5800-100 excels in