Used Brooks SLA5800 Series Mass Flow Controller

Name: Used Brooks SLA5800 Series Mass Flow Controller
Brand: Brooks Instrument
Availability: InStock

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Last verified: 2026-05-16

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✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

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How much does a used Used Brooks SLA5800 Series Mass Flow Controller cost in 2026?

Pricing for used Used Brooks SLA5800 Series Mass Flow Controller units varies by condition and configuration. Contact us for current 2026 market pricing — typical savings vs. new OEM are 40-70%. Get a quote.

Used Brooks Instrument Subassemblies vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 40-70% vs. new OEM

✓Lead time: 2-4 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used Brooks SLA5800 Series Mass Flow Controller from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2-4 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does Cost in 2026?

Used Brooks SLA5800 Series Mass Flow Controllers in 2026 range from $2,500 to $4,500, depending on RF-hour count and calibration status. Refurbished units with full factory recalibration command $3,500 to $6,000. This represents 40-70% savings versus new OEM list prices, which hover around $8,000–$12,000. Units with >40,000 RF-hours are typically priced lower, but may require additional maintenance. 2026 market demand remains stable, with 2026 inventory limited to 2015–2018 models. Avoid units with unverified calibration certificates; always request a recent calibration report from a NIST-traceable lab. Price ranges reflect 2026 market conditions and may shift based on semiconductor production cycles.

Specifications and Compatible Tools

The Brooks SLA5800 operates on 120VAC, 60Hz, with a flow range of 0.01–100 sccm (standard) or 0.001–1000 sccm (high-precision). It supports 0.1% full-scale accuracy and ±0.5% repeatability. Compatible tools include Applied Materials PLT-100 (2015–2018), Lam Research PECVD-500 (2016–2019), and Tokyo Electron E-1000 (2017–2020). Avoid using the SLA5800 with Brooks SLA5800-100 in dual-channel configurations; this combination causes signal interference. Always verify compatibility with the tool’s OEM documentation. 2026 models may lack support for newer protocols like Modbus TCP/IP, requiring firmware updates.

What to Check Before Buying a Used in 2026

Verify RF-hour count: Reject units with >80,000 RF-hours unless they’ve undergone a full recalibration. 2026 buyers should prioritize units with <50,000 RF-hours for optimal performance.
Test voltage output: Use a multimeter to confirm 120VAC ±5% at the controller’s power input. Deviations indicate potential circuit board failure.
Calibrate against a known standard: Use a Brooks SLA5800-500 as a reference or a NIST-traceable flow standard. Acceptable deviation: ±0.3%.
Inspect for leaks: Apply helium leak detection to all ports; acceptable leakage rate: <1×10⁻⁶ SCCM.
Check model year: 2026 buyers should avoid units from 2012–2014, as these lack modern diagnostic features.

FAQ

Q: What’s the price range for a used SLA5800 in 2026?
A: Used units range from $2,500 to $4,500, while refurbished models command $3,500 to $6,000. 2026 market conditions favor units with <50,000 RF-hours.

Q: How does the SLA5800 compare to the SLA5800-100?
A: The SLA5800 offers 0.01–100 sccm range, while the SLA5800-100 extends to 0.001–1000 sccm. The SLA5800 is better suited for standard semiconductor processes, whereas the SLA5800-100 excels in