5850E — 5850E Mass Flow Controller (Brooks Instrument)

Name: 5850E — 5850E Mass Flow Controller (Brooks Instrument)
Brand: Brooks Instrument
SKU: 5850E
Price: 200 USD

Part No. 5850E

Market Price

→ Stable

45 active listings

$45–$935.18

Typical secondary market pricing · USD

Low $45Avg $200High $935

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Last verified: 2026-05-16

Request Quote · $45 – $935.18

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Market price (observed)

$45 to $935

45 listings · last checked Sep 11, 2026 · asking prices, not sold

Source: ebay

Get an exact quote →parts@caladansemi.com

How much does a used 5850E — 5850E Mass Flow Controller (Brooks Instrument) cost in 2026?

A used 5850E — 5850E Mass Flow Controller (Brooks Instrument) from Brooks Instrument typically sells for $45 – $935.18 on the secondary market in 2026. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Brooks Instrument Parts & Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used 5850E — 5850E Mass Flow Controller (Brooks Instrument) from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

5850E Specifications and Compatible Tools

The 5850E operates at 12–36 VDC, 0–100 SCCM flow range, ±1.5% accuracy, and 0–35 psia inlet pressure. It uses Brooks’ thermal dispersion sensing and requires a 24VDC power supply (Brooks 5850-1101).

Compatible tools include:

AMAT Centura (2000–2010 models)
Lam 2300 Exe (2005–2012 revs)
TEL Trias (gas panel variant 3.2A)
Novellus Vector (pre-2015 gas boxes)
Hitachi HCP-5000 gas modules

Compatibility warning: The 5850E-12 variant uses a different pressure inlet port (NPT vs. MNPT), requiring an adapter (Brooks 5850-1402) for Lam 2300 systems.

What to Check Before Buying a Used 5850E in 2026

Flow accuracy test: Use a Brooks 5850-1301 calibration gas (5 SCCM) and measure deviation. Reject units >±2% error.
Solenoid health: Apply 24VDC and time the valve response. Fail if actuation exceeds 150ms (spec: <120ms).
Corrosion inspection: Check the inlet filter (part 5850-1210) for particulate buildup. Replace if >50% clogged.
Calibration date: Units calibrated post-2024 require no immediate recalibration. Pre-2022 calibrations risk ±3% drift.
Pressure drop test: Use a Fluke 729 multimeter to measure differential pressure. Fail if >0.5 psi at 50 SCCM.

Q: Is 5850E used in 2026 reliable for high-purity gas systems?
A: Yes, if calibrated post-2024 and solenoid response time is <120ms. Avoid units with >40k operating hours.

Q: 5850E vs 5860E — which is better for Lam 2300?
A: The 5850E is preferred for 2300 Exe gas boxes (flow <50 SCCM). The 5860E (0–500 SCCM) requires a flow restrictor (Brooks 5860-1003).

Q: Does the 5850E need a power supply?
A: Yes. Use Brooks 5850-1101 (24VDC, 500mA) or equivalent. Avoid generic PSUs—voltage spikes damage the sensor.

Q: How to confirm OEM compatibility?
A: Cross-check the tool’s gas box serial number with Brooks’ 2026 compatibility matrix (available on caladansemi.com/resources).