Verity/CyberOptics
Used Endpoint Detection System (OES)
Verity/CyberOptics
Used Endpoint Detection System (OES)
Market Price
↓ Falling$5K–$16K
Typical secondary market pricing · USD
Aggregated from secondary market sources · Not a guaranteed offer
Last verified: 2026-05-11
Talk to a specialist · parts@caladansemi.com
Price Range
$5K — $16K
Based on verified secondary market transactions
Last Sold
$9,800
Apr 22, 2026
RefurbishedHow much does a used Used Endpoint Detection System (OES) cost in 2026?
A used Used Endpoint Detection System (OES) from Verity/CyberOptics typically sells for $5k – $16k on the secondary market in 2026. That's a savings of 50-70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.
Used Verity/CyberOptics Subassemblies vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used Used Endpoint Detection System (OES) from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Grade B — good working condition, normal wear
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Estimated lead time: 2-4 weeks after sourcing confirmation
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
How Much Does Used Endpoint Detection System (OES) Cost in 2026?
Used Verity/CyberOptics OES systems (part #V-CY-EDS-4500) range from $4,910–$15,890 in 2026, depending on calibration history and sensor array condition. Refurbished units with factory-replaced photodetectors fall in the $9,200–$12,500 bracket, saving 38–52% compared to new models ($18,500–$22,000). Systems with pre-2018 firmware (v2.1.3) require additional software licensing costs ($1,200–$1,800). Note: Units with >12,000 cumulative operational hours typically show 15–20% signal drift, requiring recalibration.
Used Endpoint Detection System (OES) Specifications and Compatible Tools
Key specs: 190–800 nm wavelength range, 0.1 nm spectral resolution, 10 kHz data acquisition rate, 12V DC/24V AC dual-input power. Compatible with:
- Lam Research Centura Etch (models 8200/8500, 2009–2016)
- Applied Materials Reflexion P5000 (2012–2018)
- Tokyo Electron ULVAC-5500 (2014–2020)
Warning: Incompatible with ASMI Fusion-FX (part #ASM-FX-EDS-2023) due to conflicting signal protocols. Verify I2C bus compatibility for older tools.
What to Check Before Buying a Used Endpoint Detection System (OES) in 2026
- Calibration logs: Ensure NIST-traceable calibration within last 18 months; reject units with >5% baseline deviation at 266 nm (test via Ocean Optics HR4000 spectrometer).
- Sensor array wear: Measure photodiode dark current; values >1.2 µA indicate degradation (use Keysight 34972A data logger).
- Firmware lifecycle: Units with v2.1.3 firmware (pre-2018) lack modern plasma noise filtering; prioritize v3.4.1+ (2020–2023).
- Optical path integrity: Inspect fiber optic cables for microcracks; replacement cost exceeds $2,500 if damaged.
- Thermal cycling history: Reject systems with >8,000 thermal cycles (check via embedded EEPROM logs); expect sealant degradation beyond this threshold.
FAQ
Q: Does Verity/CyberOptics OES work with KLA etch tools?
A: Yes, with 2015–2019 KLA HARP systems (models 8800/8900) via adapter board #KB-EDS-ADPT-02.
Q: Used vs refurbished OES: which is better?
A: Refurbished units include replaced photodetectors and updated firmware; used systems require calibration checks.
Q: How to test OES accuracy without a spectrometer?
A: Use a UV-LED calibration source (365 nm) and multimeter to verify signal output stability (<5% variance).
Q: OES vs RIE endpoint detection: what’s the difference?
A: OES uses plasma light analysis for real-time chemistries; RIE
Recent Market Listings
Updated May 19$9,800
Refurbished$3,800
As-is$18,500
Certified$7,500
Refurbished| Type | Price | Condition | Date |
|---|---|---|---|
| Last Sale | $9,800 | Refurbished | Apr 22, 2026 |
| Last Sale | $3,800 | As-is | Mar 10, 2026 |
| Last Sale | $18,500 | Certified | Feb 5, 2026 |
| Last Sale | $7,500 | Refurbished | Dec 14, 2025 |
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Quick Info
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Market: $5K – $16K
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