Used Endpoint Detection System (OES)

Name: Used Endpoint Detection System (OES)
Brand: Verity/CyberOptics

Market Price

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Available by Request

Last verified: 2026-05-11

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Used Endpoint Detection System (OES) moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used Used Endpoint Detection System (OES) cost in 2026?

Pricing for used Used Endpoint Detection System (OES) units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Verity/CyberOptics Subassemblies vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used Endpoint Detection System (OES) from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

Used Endpoint Detection System (OES) Specifications and Compatible Tools

Key specs: 190–800 nm wavelength range, 0.1 nm spectral resolution, 10 kHz data acquisition rate, 12V DC/24V AC dual-input power. Compatible with:

Lam Research Centura Etch (models 8200/8500, 2009–2016)
Applied Materials Reflexion P5000 (2012–2018)
Tokyo Electron ULVAC-5500 (2014–2020)
Warning: Incompatible with ASMI Fusion-FX (part #ASM-FX-EDS-2023) due to conflicting signal protocols. Verify I2C bus compatibility for older tools.

What to Check Before Buying a Used Endpoint Detection System (OES) in 2026

Calibration logs: Ensure NIST-traceable calibration within last 18 months; reject units with >5% baseline deviation at 266 nm (test via Ocean Optics HR4000 spectrometer).
Sensor array wear: Measure photodiode dark current; values >1.2 µA indicate degradation (use Keysight 34972A data logger).
Firmware lifecycle: Units with v2.1.3 firmware (pre-2018) lack modern plasma noise filtering; prioritize v3.4.1+ (2020–2023).
Thermal cycling history: Reject systems with >8,000 thermal cycles (check via embedded EEPROM logs); expect sealant degradation beyond this threshold.

FAQ

Q: Does Verity/CyberOptics OES work with KLA etch tools?
A: Yes, with 2015–2019 KLA HARP systems (models 8800/8900) via adapter board #KB-EDS-ADPT-02.

Q: Used vs refurbished OES: which is better?
A: Refurbished units include replaced photodetectors and updated firmware; used systems require calibration checks.

Q: How to test OES accuracy without a spectrometer?
A: Use a UV-LED calibration source (365 nm) and multimeter to verify signal output stability (<5% variance).

Q: OES vs RIE endpoint detection: what’s the difference?
A: OES uses plasma light analysis for real-time chemistries; RIE