Used AMAT 200mm Electrostatic Chuck

Name: Used AMAT 200mm Electrostatic Chuck
Brand: Applied Materials

Market Price

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Available by Request

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Used AMAT 200mm Electrostatic Chuck moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used Used AMAT 200mm Electrostatic Chuck cost in 2026?

Pricing for used Used AMAT 200mm Electrostatic Chuck units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Applied Materials Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used AMAT 200mm Electrostatic Chuck from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

AMAT 200mm Electrostatic Chuck Specifications and Compatible Tools

This ESC operates at 10 kV DC, 500 W max power, and 1–10 kHz frequency for wafer retention. Constructed with aluminum nitride (AlN) substrate and molybdenum electrodes, it maintains <±1°C temperature uniformity. Compatible with:

AMAT Centura® Cluster Tool (models 5500/6500, 2000–2010 production)
AMAT Nexus® Etch System (models 7500/8500, 2005–2012)
Tokyo Electron Ltd. (TEL) Lambda® P500 (with custom adapter plate)

Exclusion: Not compatible with AMAT Reflexion® XP CVD (part # 665-0001-01) due to divergent RF coupling architecture. Confirm tool’s ESC interface standard (JEDEC MO-216 vs. SEMI E19) before installation.

What to Check Before Buying a Used AMAT 200mm Electrostatic Chuck in 2026

Dielectric insulation resistance: Use a megohmmeter to confirm >10¹² Ω (per IEC 60674-6). Reject parts <10¹¹ Ω.
Electrode wear: Measure electrode thickness with a profilometer. Replace if erosion exceeds 5% of original 2.5 mm (i.e., <2.38 mm).
Vacuum leak rate: Test with a Helium mass spectrometer; acceptable rate must be <5×10⁻⁷ Torr·L/s.
Cycle history: Demand OEM logs or SCADA data. Avoid parts with >12,000 cycles (typical lifecycle is 8,0