Used AMAT 200mm Electrostatic Chuck

Name: Used AMAT 200mm Electrostatic Chuck
Brand: Applied Materials
Price: 505 USD
Availability: InStock

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Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

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How much does a used Used AMAT 200mm Electrostatic Chuck cost in 2026?

A used Used AMAT 200mm Electrostatic Chuck from Applied Materials typically sells for $505 – $505 on the secondary market in 2026. That's a savings of 40–70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Applied Materials Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 40–70% vs. new OEM

✓Lead time: 2–6 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used AMAT 200mm Electrostatic Chuck from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2–6 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does a Used AMAT 200mm Electrostatic Chuck Cost in 2026?

Used AMAT 200mm electrostatic chucks (ESC) range from $16,000–$54,000 in 2026, depending on cycle history and dielectric integrity. Refurbished units with <5,000 operational cycles typically start at $28,000–$36,000, while high-mileage used parts (10,000+ cycles) drop to $16,000–$22,000. New OEM ESCs exceed $120,000, making used/refurbished options 40–70% cheaper. Key caveat: Parts with insulation resistance <10¹² Ω (per ASTM D257) require costly dielectric replacement, often invalidating cost savings. Always verify cycle count and vacuum leak rates (<1×10⁻⁶ Torr·L/s) before purchase.

AMAT 200mm Electrostatic Chuck Specifications and Compatible Tools

This ESC operates at 10 kV DC, 500 W max power, and 1–10 kHz frequency for wafer retention. Constructed with aluminum nitride (AlN) substrate and molybdenum electrodes, it maintains <±1°C temperature uniformity. Compatible with:

AMAT Centura® Cluster Tool (models 5500/6500, 2000–2010 production)
AMAT Nexus® Etch System (models 7500/8500, 2005–2012)
Tokyo Electron Ltd. (TEL) Lambda® P500 (with custom adapter plate)

Exclusion: Not compatible with AMAT Reflexion® XP CVD (part # 665-0001-01) due to divergent RF coupling architecture. Confirm tool’s ESC interface standard (JEDEC MO-216 vs. SEMI E19) before installation.

What to Check Before Buying a Used AMAT 200mm Electrostatic Chuck in 2026

Dielectric insulation resistance: Use a megohmmeter to confirm >10¹² Ω (per IEC 60674-6). Reject parts <10¹¹ Ω.
Electrode wear: Measure electrode thickness with a profilometer. Replace if erosion exceeds 5% of original 2.5 mm (i.e., <2.38 mm).
Vacuum leak rate: Test with a Helium mass spectrometer; acceptable rate must be <5×10⁻⁷ Torr·L/s.
Cycle history: Demand OEM logs or SCADA data. Avoid parts with >12,000 cycles (typical lifecycle is 8,0