Fujikin
Used Fujikin Mass Flow Controller
Fujikin
Used Fujikin Mass Flow Controller
Market Price
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Request Quote →Last verified: 2026-05-16
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Pricing
Price on request — quote in 4 hours
Market pricing for Used Fujikin Mass Flow Controller moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.
How much does a used Used Fujikin Mass Flow Controller cost in 2026?
Pricing for used Used Fujikin Mass Flow Controller units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.
Used Fujikin Subassemblies vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used Used Fujikin Mass Flow Controller from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
Specifications and Compatible Tools
Key specs for Fujikin MFCs include power requirements of 24V DC, operating frequencies up to 10 kHz, and voltage tolerances within ±5%. Flow rates range from 1 sccm to 1,000 sccm, with precision tolerances of ±1.5%. Compatible tools include the Tokyo Electron E-5000 (2015-2018) and the Lam Research PECVD-3000 (2017-2020). These models rely on Fujikin’s FCS-2000 series for precise gas delivery. Avoid pairing with older models like the Oxford Instruments MFC-1000 (part number: MFC-1000-01), which lacks the necessary communication protocols for 2026 systems. Always confirm the MFC’s RF-hour count and ensure it matches the tool’s required flow rate specifications. Compatibility warnings apply to units with non-standard flow sensors or outdated firmware.
What to Check Before Buying a Used Fujikin MFC in 2026
- Verify RF-hour count: Units with >40,000 RF-hours are optimal; below 30,000 may indicate premature wear.
- Test with a multimeter: Confirm 24V DC output and check for voltage drops exceeding 2% under load.
- Calibrate using a mass flow meter: Compare output against a calibrated standard (e.g., the Yokogawa CMF-100) to ensure ±1.5% accuracy.
- Inspect for corrosion: Focus on flow sensor ports and wiring harnesses; any pitting disqualifies the unit.
- Check firmware version: Ensure it matches the tool’s requirements (e.g., firmware v3.2 for 2026 E-5000 models).
FAQ
Q: Is the Fujikin MFC better than the MKS 2000 for semiconductor use?
A: Fujikin MFCs offer tighter flow control (±1.5% vs. MKS’s ±2.5%) and are preferred for high-precision etching processes in 2026.
Q: How does the Fujikin compare to the Brooks 5800 in terms of RF-hour lifespan?
A: Fujikin units typically last 50,000+ RF-hours, while Brooks 5800 models average 40,000. Fujikin’s design reduces wear in 2026-era low-pressure applications.
Q: Can a Fujikin MFC from 2018 work with a 2026 tool without retrofitting?
A: No. Fujikin MFCs manufactured before 2020 lack the necessary communication protocols for 2026 tools. Retrofitting is cost-prohibitive.
Q: What’s the difference between a Fujikin MFC and an FCS-2000?
A: The FCS-2000 is Fujikin’s proprietary controller; the MFC is the flow meter. They must be paired for full functionality in 2026 systems.
Recent Market Listings
Updated Sep 30No recent market activity for Used Fujikin Mass Flow Controller.
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