Used Fujikin Mass Flow Controller

How Much Does Fujikin MFC Cost in 2026?

Used Fujikin Mass Flow Controllers (MFCs) in 2026 range from $5,000 to $8,000, depending on model and condition. Refurbished units, which include factory calibration and warranty, typically fall between $7,000 and $10,000. This represents 40-70% savings versus new OEM list prices, which can exceed $15,000 for high-capacity models. Units with >40,000 RF-hours are preferred, as they align with standard lifecycle metrics for semiconductor tools. Prices vary based on flow rate capacity (e.g., 10 sccm vs. 100 sccm) and whether the MFC is paired with a flow sensor or controller. Sourcing lead times are 2-4 weeks after confirming availability. Note that condition-grade B units may show minor wear but retain full functionality for most applications. Buyers should verify RF-hour counts and calibration dates to ensure compatibility with 2026-era semiconductor equipment.

Specifications and Compatible Tools

Key specs for Fujikin MFCs include power requirements of 24V DC, operating frequencies up to 10 kHz, and voltage tolerances within ±5%. Flow rates range from 1 sccm to 1,000 sccm, with precision tolerances of ±1.5%. Compatible tools include the Tokyo Electron E-5000 (2015-2018) and the Lam Research PECVD-3000 (2017-2020). These models rely on Fujikin’s FCS-2000 series for precise gas delivery. Avoid pairing with older models like the Oxford Instruments MFC-1000 (part number: MFC-1000-01), which lacks the necessary communication protocols for 2026 systems. Always confirm the MFC’s RF-hour count and ensure it matches the tool’s required flow rate specifications. Compatibility warnings apply to units with non-standard flow sensors or outdated firmware.

What to Check Before Buying a Used Fujikin MFC in 2026

1. Verify RF-hour count: Units with >40,000 RF-hours are optimal; below 30,000 may indicate premature wear.
2. Test with a multimeter: Confirm 24V DC output and check for voltage drops exceeding 2% under load.
3. Calibrate using a mass flow meter: Compare output against a calibrated standard (e.g., the Yokogawa CMF-100) to ensure ±1.5% accuracy.
4. Inspect for corrosion: Focus on flow sensor ports and wiring harnesses; any pitting disqualifies the unit.
5. Check firmware version: Ensure it matches the tool’s requirements (e.g., firmware v3.2 for 2026 E-5000 models).

FAQ

Q: Is the Fujikin MFC better than the MKS 2000 for semiconductor use?
A: Fujikin MFCs offer tighter flow control (±1.5% vs. MKS’s ±2.5%) and are preferred for high-precision etching processes in 2026.

Q: How does the Fujikin compare to the Brooks 5800 in terms of RF-hour lifespan?
A: Fujikin units typically last 50,000+ RF-hours, while Brooks 5800 models average 40,000. Fujikin’s design reduces wear in 2026-era low-pressure applications.

Q: Can a Fujikin MFC from 2018 work with a 2026 tool without retrofitting?
A: No. Fujikin MFCs manufactured before 2020 lack the necessary communication protocols for 2026 tools. Retrofitting is cost-prohibitive.

Q: What’s the difference between a Fujikin MFC and an FCS-2000?
A: The FCS-2000 is Fujikin’s proprietary controller; the MFC is the flow meter. They must be paired for full functionality in 2026 systems.