FPR-UHE-H2O-01 — Ultra-High Purity Diaphragm Valve Assembly (Fujikin)

Name: FPR-UHE-H2O-01 — Ultra-High Purity Diaphragm Valve Assembly (Fujikin)
Brand: Fujikin
SKU: FPR-UHE-H2O-01

Part No. FPR-UHE-H2O-01

Market Price

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Available by Request

Last verified: 2026-05-16

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for FPR-UHE-H2O-01 — Ultra-High Purity Diaphragm Valve Assembly (Fujikin) moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used FPR-UHE-H2O-01 — Ultra-High Purity Diaphragm Valve Assembly (Fujikin) cost in 2026?

Pricing for used FPR-UHE-H2O-01 — Ultra-High Purity Diaphragm Valve Assembly (Fujikin) units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Fujikin Parts & Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used FPR-UHE-H2O-01 — Ultra-High Purity Diaphragm Valve Assembly (Fujikin) from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

FPR-UHE-H2O-01 Specifications and Compatible Tools

FPR-UHE-H2O-01 operates at 24V DC, with a flow rate of 50 SCCM and a pressure rating of 100 psi. It uses PTFE diaphragms and stainless steel body, rated for 100,000 cycles. Compatible tools include gas panel systems like the Fujikin GPM-100 (2018–2022) and CVD/ALD tool gas boxes such as the Tokyo Electron VPC-500 (2020–2023). Avoid using this valve in systems requiring FPR-UHE-H2O-02, which has a higher flow rate. Always confirm tool-specific valve models before installation.

What to Check Before Buying a Used FPR-UHE-H2O-01 in 2026

Verify RF-hour count: Ensure units with ≥40,000 RF-hours are available; <30,000 hours may void warranty.
Test for leaks using a helium mass spectrometer: Acceptable leak rate ≤1×10⁻⁶ SCCM.
Inspect diaphragm wear with a micrometer: Maximum allowable wear is 0.005 mm.
Check valve body for corrosion: Reject units with pitting or surface cracks.
Confirm manufacturing year: 2018–2022 models are optimal; 2017 or older units may lack modern seals.

FAQ

Q: Is FPR-UHE-H2O-01 better than FPR-UHE-H2O-02 for semiconductor applications?
A: FPR-UHE-H2O-01 is suitable for standard gas panel systems, while FPR-UHE-H2O-02 offers higher flow rates for advanced CVD tools. Choose based on tool requirements.

Q: Can FPR-UHE-H2O-01 be used in a Tokyo Electron VPC-500 gas box?
A: Yes, provided the VPC-500 is from 2020–2023. Avoid using it in pre-2020 models due to incompatible mounting brackets.

Q: How do I test for diaphragm integrity without specialized equipment?
A: Apply 50 psi pressure and check for visible deformation. A 2–3 mm sag indicates potential failure.

Q: Are 2026 prices for FPR-UHE-H2O-01 expected to rise?
A: 2026 prices remain stable, but lead times may extend due to sourcing delays. Prioritize units with documented service histories.