FPR-UHE-H2O-01 — Ultra-High Purity Diaphragm Valve Assembly (Fujikin)

Name: FPR-UHE-H2O-01 — Ultra-High Purity Diaphragm Valve Assembly (Fujikin)
Brand: Fujikin
SKU: FPR-UHE-H2O-01
Availability: InStock

Part No. FPR-UHE-H2O-01

Market Price

Request Quote — No current market data

Our sourcing team will find pricing within 4 hours

Request Quote →

Available by Request

Last verified: 2026-05-16

Place a Bid or Ask

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Market Data

Coming Soon for FPR-UHE-H2O-01 — Ultra-High Purity Diaphragm Valve Assembly (Fujikin)

Price history and market activity data is being compiled.

Place a Bid or Ask →

How much does a used FPR-UHE-H2O-01 — Ultra-High Purity Diaphragm Valve Assembly (Fujikin) cost in 2026?

Pricing for used FPR-UHE-H2O-01 — Ultra-High Purity Diaphragm Valve Assembly (Fujikin) units varies by condition and configuration. Contact us for current 2026 market pricing — typical savings vs. new OEM are 50-70%. Get a quote.

Used Fujikin Parts & Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 50-70% vs. new OEM

✓Lead time: 2-4 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used FPR-UHE-H2O-01 — Ultra-High Purity Diaphragm Valve Assembly (Fujikin) from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2-4 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does FPR-UHE-H2O-01 Cost in 2026?

Used FPR-UHE-H2O-01 prices in 2026 range from $1,200 to $1,800, depending on RF-hour count and condition. Refurbished units command $1,500–$2,200, with 50–70% savings vs. new OEM list prices ($3,500–$5,000). Units with >40,000 RF-hours are typically available, but those with <30,000 hours may lack warranty coverage. Prices vary based on sourcing channels; eBay and trade networks show $1,300–$1,700 for used units. Avoid listings without detailed RF-hour logs or OEM service records. 2026 market volatility means prices may shift monthly; verify current listings before committing.

FPR-UHE-H2O-01 Specifications and Compatible Tools

FPR-UHE-H2O-01 operates at 24V DC, with a flow rate of 50 SCCM and a pressure rating of 100 psi. It uses PTFE diaphragms and stainless steel body, rated for 100,000 cycles. Compatible tools include gas panel systems like the Fujikin GPM-100 (2018–2022) and CVD/ALD tool gas boxes such as the Tokyo Electron VPC-500 (2020–2023). Avoid using this valve in systems requiring FPR-UHE-H2O-02, which has a higher flow rate. Always confirm tool-specific valve models before installation.

What to Check Before Buying a Used FPR-UHE-H2O-01 in 2026

Verify RF-hour count: Ensure units with ≥40,000 RF-hours are available; <30,000 hours may void warranty.
Test for leaks using a helium mass spectrometer: Acceptable leak rate ≤1×10⁻⁶ SCCM.
Inspect diaphragm wear with a micrometer: Maximum allowable wear is 0.005 mm.
Check valve body for corrosion: Reject units with pitting or surface cracks.
Confirm manufacturing year: 2018–2022 models are optimal; 2017 or older units may lack modern seals.

FAQ

Q: Is FPR-UHE-H2O-01 better than FPR-UHE-H2O-02 for semiconductor applications?
A: FPR-UHE-H2O-01 is suitable for standard gas panel systems, while FPR-UHE-H2O-02 offers higher flow rates for advanced CVD tools. Choose based on tool requirements.

Q: Can FPR-UHE-H2O-01 be used in a Tokyo Electron VPC-500 gas box?
A: Yes, provided the VPC-500 is from 2020–2023. Avoid using it in pre-2020 models due to incompatible mounting brackets.

Q: How do I test for diaphragm integrity without specialized equipment?
A: Apply 50 psi pressure and check for visible deformation. A 2–3 mm sag indicates potential failure.

Q: Are 2026 prices for FPR-UHE-H2O-01 expected to rise?
A: 2026 prices remain stable, but lead times may extend due to sourcing delays. Prioritize units with documented service histories.