Horiba
Used Horiba SEC Series Mass Flow Controller
Horiba
Used Horiba SEC Series Mass Flow Controller
Market Price
→ Stable$694–$3K
Typical secondary market pricing · USD
Aggregated from secondary market sources · Not a guaranteed offer
Talk to a specialist · parts@caladansemi.com
Market Data
Coming Soon for Used Horiba SEC Series Mass Flow Controller
Price history and market activity data is being compiled.
How much does a used Used Horiba SEC Series Mass Flow Controller cost in 2026?
A used Used Horiba SEC Series Mass Flow Controller from Horiba typically sells for $694 – $3k on the secondary market in 2026. That's a savings of 40–70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.
Used Horiba Subassemblies vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used Used Horiba SEC Series Mass Flow Controller from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Grade B — good working condition, normal wear
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Estimated lead time: 2–6 weeks after sourcing confirmation
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
How Much Does Used Horiba SEC Series Mass Flow Controller Cost in 2026?
In 2026, used Horiba SEC Series MFCs (models SEC-5000/SEC-3000) range from $694–$2,735, depending on flow capacity and condition. Refurbished units with recalibration certificates typically cost $1,200–$2,735, while non-refurbished used parts fall between $694–$1,100. Compared to new OEM pricing (averaging $9,500–$12,000), used parts offer 70–85% savings. Note: Units with original calibration certificates dated before 2020 require full recalibration (avg. $450) to meet 2026 SEMI E148 standards.
Horiba SEC Series Mass Flow Controller Specifications and Compatible Tools
Key specs: 0–100 sccm flow range, ±0.5% accuracy, 12–24V DC power, 4–20 mA output, and max 30 psia inlet pressure. Compatible with:
- Lam Research Centura Cluster Tool (2005–2012 production)
- Applied Materials P5000 Etch System (2008–2015)
- AMAT Endura CVD Platforms (2007–2014)
Exclusion: Not compatible with Axcelis 3200 Implanters using part number 789-456-2 (requires SEC-7000 series). Verify tool’s gas manifold interface before installation.
What to Check Before Buying a Used Horiba SEC Series Mass Flow Controller in 2026
- Flow accuracy: Test with a dry nitrogen reference (0–100 sccm). Deviation >±1% invalidates spec. Use a MKS 281A flow bench for verification.
- Voltage stability: Measure supply voltage under load with a Fluke 434 II. Ripple >5% indicates degraded electronics.
- Calibration date: Reject units without
Recent Market Listings
Updated May 19$590
As-is$1,306
Used$2,123
Refurbished| Type | Price | Condition | Date |
|---|---|---|---|
| Ask | $590 | As-is | May 12, 2026 |
| Ask | $1,306 | Used | May 5, 2026 |
| Ask | $2,123 | Refurbished | Apr 28, 2026 |
Place a bid · Prices update daily
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Market: $694 – $3K
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