Used RGA Mass Spectrometer Head

Name: Used RGA Mass Spectrometer Head
Brand: Various (MKS, SRS, Pfeiffer)

Market Price

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Available by Request

Last verified: 2026-05-16

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✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Used RGA Mass Spectrometer Head moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

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How much does a used Used RGA Mass Spectrometer Head cost in 2026?

Pricing for used Used RGA Mass Spectrometer Head units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Various (MKS, SRS, Pfeiffer) Subassemblies vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used RGA Mass Spectrometer Head from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

RGA Mass Spectrometer Head Specifications and Compatible Tools

Parameter	SRS RGA 200	MKS QuadMass 422	Pfeiffer PrismaFlex
Mass range	1–200 amu	1–200 amu	1–100 amu (standard)
Operating pressure	10⁻⁴–10⁻⁸ Torr	10⁻⁴–10⁻⁸ Torr	10⁻³–10⁻⁹ Torr
Sensitivity	5×10⁻¹⁴ A/Torr	1×10⁻¹³ A/Torr	1×10⁻¹² A/Torr
Interface	USB / RS-232	Analog / Ethernet	Ethernet / RS-485
Filament type	Y₂O₃ coated W	Rhenium	Iridium coated W
Flange	CF 2.75"	CF 2.75"	DN40 CF

Compatible systems: Applied Materials Centura process chambers, Lam Research etch systems, Novellus CVD chambers, and any vacuum system operating in the 10⁻⁴ to 10⁻⁸ Torr range. Compatibility warning: Pfeiffer PrismaFlex heads use proprietary RS-485 protocol and are NOT compatible with SRS or MKS control software without a protocol converter — confirm software compatibility before purchase.

What to Check Before Buying a Used RGA Head in 2026

Mass calibration verification: Run a calibration check on known gas peaks (N₂ at 28, Ar at 40, H₂O at 18). Peak centers drifting >0.1 amu from nominal indicate quadrupole mass filter wear — not field-repairable on most models.
Vacuum flange condition: Inspect the CF flange knife-edge for nicks >0.05mm depth. A damaged knife-edge causes virtual leaks that look like process gas contamination — a common misdiagnosis with used RGA heads.
Sensitivity baseline: Test minimum detectable partial pressure. Units from 2003–2012 production should read <1×10⁻¹² Torr at 10⁻⁸ system base pressure. Degraded electron multipliers reduce sensitivity by 10x per decade of age — confirm against spec.
Electronics and firmware: Check analog output accuracy with a known reference gas at 1×10⁻⁶ Torr. Output drift >10% of reading indicates A/D converter aging in older units. Firmware updates (free from SRS/Pfeiffer) resolve most software-side calibration issues in units post-2010.

Frequently Asked Questions

SRS RGA 200 vs. Pfeiffer PrismaFlex — which is better for process monitoring? SRS RGA 200 is the workhorse of the industry — simpler firmware, lower cost, faster scan rates (up to 50 amu/sec). PrismaFlex wins for sensitivity-critical applications (<10⁻¹⁰ Torr partial pressure detection) and integrates natively into Pfeiffer vacuum systems. For a standalone semiconductor etch tool, SRS RGA 200 is the better value; for a research system needing the lowest detection limits, go PrismaFlex.

How reliable are used RGA heads compared to new? Properly tested used RGA heads deliver equivalent results to new for 3–6 years from purchase, provided the filament and electron multiplier are within spec. The key failure modes (filament wear, multiplier aging) are detectable with a 30-minute bench test — don't skip it.

How often do RGA heads need recalibration? Every 12 months in production, or after any vacuum system event (pump failure, atmospheric exposure, major process change).

Can a used RGA head be upgraded with a modern interface? MKS QuadMass units can accept an Ethernet upgrade card. Pfeiffer units are harder to retrofit — proprietary architecture limits third-party upgrades.

Last updated: May 2026. Pricing reflects current 2026 secondary market conditions. Request a quote for current availability.