Used MECS Wafer Transfer Robot (Hirata)

Name: Used MECS Wafer Transfer Robot (Hirata)
Brand: MECS (Hirata)

Market Price

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Available by Request

Last verified: 2026-05-16

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✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Used MECS Wafer Transfer Robot (Hirata) moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used Used MECS Wafer Transfer Robot (Hirata) cost in 2026?

Pricing for used Used MECS Wafer Transfer Robot (Hirata) units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used MECS (Hirata) Subassemblies vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used MECS Wafer Transfer Robot (Hirata) from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

MECS Robot Specifications and Compatible Tools

Parameter	MECS-SA-200	MECS-DA-300
Wafer size	200mm	300mm
Arms	Single	Dual
Reach	350mm	450mm
Repeatability	±0.2mm	±0.1mm
Speed	500mm/sec	800mm/sec
End-effector	Bernoulli / edge-grip	Edge-grip / vacuum
Interface	SEMI E84 / RS-232	SEMI E84 / Ethernet
Environment	Atmospheric (Class 10)	Atmospheric (Class 1)

Compatible tools: Applied Materials Centura atmospheric section, Lam Research 2300 front-end, Tokyo Electron ACT-8, and Kokusai batch furnace front-end loaders. Compatibility warning: MECS robots configured for SEMI E84 Active Low protocol are NOT compatible with tools expecting Active High — a single DIP switch setting controls this, but it must be verified before installation or the robot will fail SEMI E84 handshake and cause tool interlock faults.

What to Check Before Buying a Used MECS Arm Robot in 2026

Drive motor current draw: Under load, compare motor current to OEM spec. Draws >15% above nominal indicate motor winding degradation — common in units from 2004–2010 production with >30,000 hours of operation.

Frequently Asked Questions

How long do used MECS robots last in a production environment? A refurbished MECS arm robot reliably runs 8–15 years in production.

MECS (Hirata) vs. Brooks Automation SCARA for atmospheric transfer — which is better? MECS arms have faster acceleration profiles and better 300mm support; Brooks SCARA arms have a larger installed base in 200mm tools and better third-party service coverage in the US. For 300mm tools, MECS-DA-300 is preferred; for 200mm legacy tools with Brooks-based EFEM, stick with Brooks to avoid integration complexity.

Can I use a MECS robot from one tool type in a different tool? Often yes, but the EFEM controller must support the MECS communication protocol (SEMI E84 + RS-232 or Ethernet depending on model). Verify the host controller software supports MECS command set — Applied Materials and TEL tools typically have MECS drivers; others may require custom integration.

What's the most common reason MECS robots fail in the field? Harmonic drive gear wear is the top cause of permanent failure — gradual, shows as increasing positional error over 6–18 months. Detectable early with a repeatability trending test. End-effector wafer drops from pad contamination are the top cause of recoverable faults — clean or replace pads quarterly in production.

Last updated: May 2026. Pricing reflects current 2026 secondary market conditions. Request a quote for current availability.