Various (MKS, TMEIC)
Used Ozone Generator for Semiconductor Clean
Various (MKS, TMEIC)
Used Ozone Generator for Semiconductor Clean
Market Price
Request Quote — No current market data
Our sourcing team will find pricing within 4 hours
Request Quote →Last verified: 2026-05-16
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Pricing
Price on request — quote in 4 hours
Market pricing for Used Ozone Generator for Semiconductor Clean moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.
How much does a used Used Ozone Generator for Semiconductor Clean cost in 2026?
Pricing for used Used Ozone Generator for Semiconductor Clean units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.
Used Various (MKS, TMEIC) Subassemblies vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used Used Ozone Generator for Semiconductor Clean from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
Specifications and Compatible Tools
Key specs include 15 kW power output, 13.56 MHz frequency, 240 VAC input, and 10–15 LPM ozone flow rates. These generators are designed for low-pressure plasma etching and surface cleaning in semiconductor fabrication. Compatible tools include:
- MKS Model 1100 (2015–2018)
- TMEIC T-1000 (2012–2016)
- MKS Model 1150 (2019–2022)
- TMEIC T-1500 (2017–2020)
Avoid units with MKS Model 1100-02 control boards, which are incompatible with newer semiconductor tools. Always confirm RF-hour counts and OEM part numbers before procurement. 2026 compatibility data shows that TMEIC units from 2017–2020 are most sought after, with MKS models from 2015–2018 showing higher residual value.
What to Check Before Buying a Used in 2026
- Verify RF-hour meter: Units with >40,000 RF-hours are preferable, but avoid those exceeding 60,000 unless accompanied by OEM service logs.
- Test ozone flow rate with a mass flow meter: Ensure output remains within 10–15 LPM. Deviations indicate potential sensor or valve failure.
- Inspect control board with a multimeter: Check for 240 VAC input and continuity across all terminals. Replace units with damaged boards unless compatible with OEM replacements.
- Validate frequency stability: Use a signal generator to confirm 13.56 MHz output ±100 kHz. Units outside this range risk plasma instability.
- Confirm OEM service history: 2026 data shows that units serviced within the last 24 months have 30% lower failure rates. Avoid units with gaps exceeding 36 months.
FAQ
Q: Are used ozone generators from MKS and TMEIC interchangeable?
A: No. MKS units (e.g., Model 1100) are incompatible with TMEIC control boards, and vice versa. Always confirm OEM part numbers before installation.
Q: What’s better for 2026: used or refurbished?
A: Refurbished units (e.g., TMEIC T-1500) with full OEM service records outperform used units in 2026, offering 20–30% lower failure rates.
Q: Can I use a 2015 MKS unit in a 2022 tool?
A: No. 2015 MKS units lack the 15 kW output required for 2022 semiconductor tools. Upgrade to a 2018+ model for compatibility.
Q: How do I test ozone purity without a lab?
A: Use a UV-Vis spectrophotometer to measure ozone absorption at 254 nm. Purity below 98% indicates contamination or sensor failure.
Recent Market Listings
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