Used Silane (SiH4) Mass Flow Controller (Purge-to-Fail Safe)

Name: Used Silane (SiH4) Mass Flow Controller (Purge-to-Fail Safe)
Brand: Various (MKS, Brooks)
Price: 1976 USD
Availability: InStock

Market Price

→ Stable

$632–$3K

Typical secondary market pricing · USD

Low $632Avg $1,976High $3,320

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Request Quote · $632 – $3K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

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How much does a used Used Silane (SiH4) Mass Flow Controller (Purge-to-Fail Safe) cost in 2026?

A used Used Silane (SiH4) Mass Flow Controller (Purge-to-Fail Safe) from Various (MKS, Brooks) typically sells for $632 – $3k on the secondary market in 2026. That's a savings of 40–70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Various (MKS, Brooks) Subassemblies vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 40–70% vs. new OEM

✓Lead time: 2–6 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used Silane (SiH4) Mass Flow Controller (Purge-to-Fail Safe) from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2–6 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does a Used Silane (SiH4) Mass Flow Controller (Purge-to-Fail Safe) Cost in 2026?

Used units range from $632–$1,950, refurbished models from $1,200–$3,320. New OEM equivalents (e.g., MKS 268A-123456) exceed $8,500, offering 40–70% savings over original pricing. Caveat: Controllers with calibration certificates older than 3 years require additional verification—factor in $150–$300 for recertification. Prices vary by manufacturer (Brooks Instruments models typically 15% higher than MKS equivalents) and flow range (0–100 sccm vs 0–500 sccm).

Silane (SiH4) Mass Flow Controller (Purge-to-Fail Safe) Specifications and Compatible Tools

Key specs: 0–100 sccm flow range, ±0.5% accuracy, 100ms response time, 12–24V DC power, 4–20mA output, and fail-safe purge mode (switches to nitrogen bleed on power loss). Compatible with:

Applied Materials Centura (1998–2005)
Lam Research Endura (2000–2007)
ASM EpiCore (2002–2006)
Exclusion: Not compatible with MKS 268A-123456 variants using proprietary SiH4 protocols. Verify tool’s gas manifold interface (NPT vs. ISO 14469) before purchase.

What to Check Before Buying a Used Silane (SiH4) Mass Flow Controller in 2026

Leak test: Use helium mass spectrometer; <1×10⁻⁶ std cm³/sec leakage acceptable.
Fail-safe validation: Simulate power loss; purge valve must activate within 200ms (measure with oscilloscope).
Calibration history: Reject units without documentation older than 5 years.
O-ring condition: Replace if Viton seals show cracking (use durometer: <75 Shore A requires replacement).
Flow accuracy: Test with certified gas standard; deviation >0.1% of setpoint invalidates spec.

FAQ

Q: What’s the difference between purge-to-fail and shut-off mode?
A: Purge-to-fail routes gas to vent on failure; shut-off mode closes the valve, requiring manual reset. Purge mode is mandatory for pyrophoric gases like SiH4.

Q: Can I use this on a non-listed tool?
A: Yes, if the tool accepts 4–20mA input and has a 12–24V DC power supply. Confirm gas compatibility with the MFC’s material certification.

**Q: Used vs. refurbished