Various (MKS, Brooks)
Used Silane (SiH4) Mass Flow Controller (Purge-to-Fail Safe)
Various (MKS, Brooks)
Used Silane (SiH4) Mass Flow Controller (Purge-to-Fail Safe)
Market Price
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Pricing
Price on request — quote in 4 hours
Market pricing for Used Silane (SiH4) Mass Flow Controller (Purge-to-Fail Safe) moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.
How much does a used Used Silane (SiH4) Mass Flow Controller (Purge-to-Fail Safe) cost in 2026?
Pricing for used Used Silane (SiH4) Mass Flow Controller (Purge-to-Fail Safe) units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.
Used Various (MKS, Brooks) Subassemblies vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used Used Silane (SiH4) Mass Flow Controller (Purge-to-Fail Safe) from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
Silane (SiH4) Mass Flow Controller (Purge-to-Fail Safe) Specifications and Compatible Tools
Key specs: 0–100 sccm flow range, ±0.5% accuracy, 100ms response time, 12–24V DC power, 4–20mA output, and fail-safe purge mode (switches to nitrogen bleed on power loss). Compatible with:
- Applied Materials Centura (1998–2005)
- Lam Research Endura (2000–2007)
- ASM EpiCore (2002–2006)
Exclusion: Not compatible with MKS 268A-123456 variants using proprietary SiH4 protocols. Verify tool’s gas manifold interface (NPT vs. ISO 14469) before purchase.
What to Check Before Buying a Used Silane (SiH4) Mass Flow Controller in 2026
- Leak test: Use helium mass spectrometer; <1×10⁻⁶ std cm³/sec leakage acceptable.
- Fail-safe validation: Simulate power loss; purge valve must activate within 200ms (measure with oscilloscope).
- Calibration history: Reject units without documentation older than 5 years.
- O-ring condition: Replace if Viton seals show cracking (use durometer: <75 Shore A requires replacement).
- Flow accuracy: Test with certified gas standard; deviation >0.1% of setpoint invalidates spec.
FAQ
Q: What’s the difference between purge-to-fail and shut-off mode?
A: Purge-to-fail routes gas to vent on failure; shut-off mode closes the valve, requiring manual reset. Purge mode is mandatory for pyrophoric gases like SiH4.
Q: Can I use this on a non-listed tool?
A: Yes, if the tool accepts 4–20mA input and has a 12–24V DC power supply. Confirm gas compatibility with the MFC’s material certification.
Recent Market Listings
Updated Sep 30No recent market activity for Used Silane (SiH4) Mass Flow Controller (Purge-to-Fail Safe).
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