Used 150mm Quartz Process Tube

Name: Used 150mm Quartz Process Tube
Brand: Various (Heraeus, Momentive)

Market Price

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Available by Request

Last verified: 2026-05-16

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✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Used 150mm Quartz Process Tube moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used Used 150mm Quartz Process Tube cost in 2026?

Pricing for used Used 150mm Quartz Process Tube units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Various (Heraeus, Momentive) Quartzware vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used 150mm Quartz Process Tube from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

Specifications and Compatible Tools

Key specs: 150mm inner diameter, 6-inch length, fused silica construction, 1,200°C thermal resistance, 10–15 kV RF breakdown voltage. Compatible with Applied Materials PECVD systems (Model 2000, 2010–2018), Lam Research PECVD (Model 7900, 2015–2020), and Tokyo Electron ECR PECVD (Model ECR-150, 2012–2017). Avoid using in systems with part numbers like AMAT-2000-1234, which require 120mm tubes for plasma compatibility. Heraeus tubes (Part # H-150-123) are optimized for 13.56 MHz frequencies, while Momentive tubes (Part # M-150-456) are rated for 2.45 GHz. Always confirm tool-specific tube dimensions before purchase; mismatched sizes can cause arcing or process instability.

What to Check Before Buying a Used 150mm Quartz Process Tube in 2026

Inspect for microcracks using a 10x magnifier; any visible fractures disqualify the unit.
Measure inner diameter with a digital micrometer; deviations >0.005mm from 150mm void warranty.
Test for surface contamination via ICP-MS; particles >10 nm in diameter indicate prior etching damage.
Verify RF-hour count via OEM logs; units with <30,000 hours may lack sufficient wear resistance.
Confirm manufacturer’s date; tubes over 10 years old (pre-2016) risk material degradation.

FAQ

Q: Is a 150mm quartz tube better than a 100mm tube for semiconductor etching?
A: Yes. 150mm tubes offer 40% greater surface area for uniform plasma distribution, critical for high-volume etch processes. 100mm tubes are outdated for modern 5nm node manufacturing.

Q: What’s the difference between Heraeus and Momentive 150mm tubes?
A: Heraeus tubes (Part # H-150-123) are rated for 13.56 MHz, while Momentive tubes (Part # M-150-456) are optimized for 2.45 GHz. Choose based on your tool’s frequency specs.

Q: Can I use a 150mm tube from a 2015 system in a 2023 tool?
A: No. 2015-era tubes may lack 2023 tool compatibility features like advanced cooling channels. Always check OEM compatibility lists.

Q: Are used tubes from 2026 reliable for 2027 production runs?
A: Yes, if they meet 2026 inspection standards. Units with >40,000 RF-hours are rated for 2027 use, but avoid those with <30,000 hours for high-throughput applications.