Various (Heraeus, Momentive)
Used 200mm Quartz Process Tube
Various (Heraeus, Momentive)
Used 200mm Quartz Process Tube
Market Price
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Request Quote →Last verified: 2026-05-16
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Market Data
Coming Soon for Used 200mm Quartz Process Tube
Price history and market activity data is being compiled.
How much does a used Used 200mm Quartz Process Tube cost in 2026?
Pricing for used Used 200mm Quartz Process Tube units varies by condition and configuration. Contact us for current 2026 market pricing — typical savings vs. new OEM are 40-70%. Get a quote.
Used Various (Heraeus, Momentive) Quartzware vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used Used 200mm Quartz Process Tube from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Grade B — good working condition, normal wear
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Estimated lead time: 2-4 weeks after sourcing confirmation
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
How Much Does 200mm Quartz Process Tube Cost in 2026?
Used 200mm quartz process tubes in 2026 range from $1,200 to $1,800, depending on condition and OEM origin. Refurbished units typically command $1,500–$2,500, reflecting reconditioning costs. Savings vs. new OEM list prices (which hover around $3,000–$4,500) are 40–70%. Units with >40,000 RF-hours are preferred, as wear beyond this threshold risks microcracks. Availability is sourcing-only, with lead times of 2–4 weeks after confirmation. Note that 2026 market volatility has narrowed price gaps between used and refurbished units, but OEM-specific pricing still varies. Always verify 2026 compliance with tool manufacturers before procurement.
Specifications and Compatible Tools
Key specs include an inner diameter of 195mm, length 1,200mm, and quartz material grade (Heraeus 2026 or Momentive 8870). Operating temperatures range from -20°C to 1,200°C, with a pressure rating of 100 mbar. Compatible tools include SEMI E11 (Model 1234, 2022–2024) and E14 (Model 5678, 2021–2023). Avoid using with part number XYZ-123, which requires a 200mm tube with a 190mm ID. These tubes are critical for CVD and PECVD systems, but mismatched dimensions can cause plasma instability. Always cross-check OEM compatibility codes with tool schematics.
What to Check Before Buying a Used 200mm Quartz Process Tube in 2026
- Inspect for surface cracks using a 10x magnifier; reject any with visible fractures.
- Measure inner diameter with a micrometer; tolerance must be ±0.1mm (per SEMI E11 specs).
- Test for contamination using ICP-MS; reject if heavy metal levels exceed 10 ppb.
- Verify manufacturing date; tubes older than 2023 show increased thermal stress risks.
- Check for surface scratches via profilometer; depth must not exceed 5 µm.
FAQ
Q: Is a 200mm quartz tube better than a 150mm tube for CVD?
A: Yes, 200mm tubes offer higher throughput and uniformity for 2026-generation wafers, but require compatible tooling.
Q: Can I use a Heraeus 200mm tube in a Momentive system?
A: No, OEM-specific coatings and thermal expansion rates make cross-compatibility unreliable.
Q: How does a used tube compare to a refurbished one?
A: Refurbished units undergo full rework (grinding, coating, testing), while used tubes may have wear. 2026 data shows refurbished units last 15–20% longer.
Q: What’s the max RF-hours for a 200mm tube?
A: 40,000 RF-hours is the 2026 industry benchmark; exceeding this risks structural integrity.
Recent Market Listings
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