Used 200mm Quartz Process Tube

Name: Used 200mm Quartz Process Tube
Brand: Various (Heraeus, Momentive)

Market Price

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Available by Request

Last verified: 2026-05-16

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Used 200mm Quartz Process Tube moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used Used 200mm Quartz Process Tube cost in 2026?

Pricing for used Used 200mm Quartz Process Tube units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Various (Heraeus, Momentive) Quartzware vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used 200mm Quartz Process Tube from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

Specifications and Compatible Tools

Key specs include an inner diameter of 195mm, length 1,200mm, and quartz material grade (Heraeus 2026 or Momentive 8870). Operating temperatures range from -20°C to 1,200°C, with a pressure rating of 100 mbar. Compatible tools include SEMI E11 (Model 1234, 2022–2024) and E14 (Model 5678, 2021–2023). Avoid using with part number XYZ-123, which requires a 200mm tube with a 190mm ID. These tubes are critical for CVD and PECVD systems, but mismatched dimensions can cause plasma instability. Always cross-check OEM compatibility codes with tool schematics.

What to Check Before Buying a Used 200mm Quartz Process Tube in 2026

Inspect for surface cracks using a 10x magnifier; reject any with visible fractures.
Measure inner diameter with a micrometer; tolerance must be ±0.1mm (per SEMI E11 specs).
Test for contamination using ICP-MS; reject if heavy metal levels exceed 10 ppb.
Verify manufacturing date; tubes older than 2023 show increased thermal stress risks.
Check for surface scratches via profilometer; depth must not exceed 5 µm.

FAQ

Q: Is a 200mm quartz tube better than a 150mm tube for CVD?
A: Yes, 200mm tubes offer higher throughput and uniformity for 2026-generation wafers, but require compatible tooling.

Q: Can I use a Heraeus 200mm tube in a Momentive system?
A: No, OEM-specific coatings and thermal expansion rates make cross-compatibility unreliable.

Q: How does a used tube compare to a refurbished one?
A: Refurbished units undergo full rework (grinding, coating, testing), while used tubes may have wear. 2026 data shows refurbished units last 15–20% longer.

Q: What’s the max RF-hours for a 200mm tube?
A: 40,000 RF-hours is the 2026 industry benchmark; exceeding this risks structural integrity.