Used Refrigerated Recirculating Chiller for Semiconductor Equipment

Name: Used Refrigerated Recirculating Chiller for Semiconductor Equipment
Brand: Various (SMC, Thermo Fisher Neslab, Julabo, Lauda)

Market Price

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Available by Request

Last verified: 2026-05-16

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✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Used Refrigerated Recirculating Chiller for Semiconductor Equipment moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

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How much does a used Used Refrigerated Recirculating Chiller for Semiconductor Equipment cost in 2026?

Pricing for used Used Refrigerated Recirculating Chiller for Semiconductor Equipment units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Various (SMC, Thermo Fisher Neslab, Julabo, Lauda) Subassemblies vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used Refrigerated Recirculating Chiller for Semiconductor Equipment from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

Refrigerated Chiller Specifications and Compatible Tools

Parameter	SMC HRS012	SMC HRS050	Neslab RTE-740
Cooling capacity	1.2 kW	5.0 kW	2.5 kW
Temperature range	–20°C to +40°C	–20°C to +40°C	–40°C to +200°C
Flow rate	8 L/min	25 L/min	12 L/min
Control accuracy	±0.1°C	±0.1°C	±0.01°C
Coolant	Water / Galden HT	Water / Galden HT	Water / ethylene glycol
Power	0.9 kW, single-phase	3.2 kW, 3-phase	1.8 kW, single-phase
Interface	RS-485 / Modbus	RS-485 / Modbus	RS-232 / analog

Compatible applications: Applied Materials Centura RF generator cooling, Lam Research etch electrode cooling, Veeco MBE cold panel, Coherent/II-VI laser chiller circuits.

What to Check Before Buying a Used Recirculating Chiller in 2026

Refrigerant leak check: Use an electronic refrigerant detector (e.g., Fieldpiece SRL8) on all fittings, Schrader valves, and the condenser coil. Any detectable leak must be repaired before operation — refrigerant loss is illegal to vent and causes compressor failure within 50–200 operating hours.

Frequently Asked Questions

SMC HRS chiller vs. Thermo Fisher Neslab — which is better for semiconductor process tools? SMC HRS series wins for low-temperature precision (±0.1°C) in the –20°C to +40°C range and has an overwhelming installed base in Applied Materials, Lam Research, and TEL tools — spare parts and service are widely available in the US and Japan. Neslab RTE-740 is superior for extended temperature range (–40°C to +200°C) and higher precision (±0.01°C), making it the choice for laser and MBE applications. For standard etch and CVD tool cooling, SMC HRS is the default.

How long do used semiconductor chillers last? SMC HRS and Neslab chillers running in temperature-controlled fabs last 12–18 years with proper maintenance. The compressor is the life-limiting component — hermetic scroll compressors (SMC HRS) have MTBF of 50,000 hours; piston compressors (older Neslab) average 30,000 hours. Monitor compressor current draw annually: >10% above nameplate indicates wear.

Can I run a used chiller with DI water instead of the OEM coolant? Yes for most tools, but DI water is corrosive to copper and mild steel internal components — verify the chiller's internal materials are 316L stainless or PVDF-lined. SMC HRS units use stainless reservoirs and are DI water compatible. Older Neslab units with copper heat exchangers are not — use a corrosion inhibitor (e.g., Dowfrost HD) instead.

What's the biggest risk with buying a used chiller without inspection? Refrigerant depletion — a chiller with 50% refrigerant charge will cool at reduced capacity and the compressor will fail within months from overheating. This is invisible without gauging the refrigerant circuit. Always require a seller-provided refrigerant pressure reading at ambient temperature, or plan for a recharge as part of your procurement cost.

Last updated: May 2026. Pricing reflects current 2026 secondary market conditions. Request a quote for current availability.