Used Residual Gas Analyzer (RGA)

How Much Does a Used Residual Gas Analyzer (RGA) Cost in 2026?

Used RGAs from MKS (model 907) or Stanford Research (model SRM-400) will range between $4,550–$13,400 in 2026, depending on age and calibration history. Refurbished units with <3 years since last service drop to $4,550–$6,800, while older used systems without full documentation climb to $10,200–$13,400. This represents 70–85% savings versus new equivalents ($30k–$50k). Caveat: Units with >10 years of operational age often require magnet realignment, adding $1,200–$2,500 in post-purchase labor. Always verify mass resolution (<0.5 amu) and vacuum compatibility (≤10⁻⁹ Torr) in the spec sheet before committing.

RGA Specifications and Compatible Tools

Key specs: mass range 1–200 amu, resolution <0.5 amu, vacuum interface ¼” CF, data output IEEE-488/GPIB. Compatible with:

• Lam Research Centura P5000 (1998–2005)
• Applied Materials Endura 5500 (2000–2008)
• Veeco Nexus 300 (2002–2010)
• AKT Heron II (2001–2007)
  Warning: Do not install on Varian 310-0123 tools without a GPIB-to-Ethernet adapter (PN: 987-1122). Older AKT models (pre-2003) use a proprietary analog interface requiring a $1,500 conversion kit. Cross-check your tool’s process pressure requirements—some RGAs degrade above 10⁻⁷ Torr.

What to Check Before Buying a Used RGA in 2026

1. Mass resolution test: Use a helium leak standard (1×10⁻⁹ atm·L/s) to confirm <0.5 amu resolution. Fail if >1.0 amu.
2. Vacuum seal integrity: Pressure test with a helium mass spectrometer. Reject if leak rate >5×10⁻¹⁰ Torr·L/s.
3. Ion source condition: Check filament emission current. Replace if <1.2 mA (spec: 1.5–2.0 mA).
4. Calibration history: Units without N