✓Caladan Certified✓Export Compliant✓30-Day Warranty✓Escrow Protected

Various (AE, MKS, Daihen)

Used RF Match Network / Impedance Matching Box

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Various (AE, MKS, Daihen)

Used RF Match Network / Impedance Matching Box

Name: Used RF Match Network / Impedance Matching Box
Brand: Various (AE, MKS, Daihen)
Price: 5140 USD
Availability: InStock

Market Price

↑ Rising

$2K–$8K

Typical secondary market pricing · USD

Low $2,190Avg $5,140High $8,090

Save 50-70% vs OEM new

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Last verified: 2026-05-11

Request Quote · $2K – $8K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Market DataRF Match Network

Trending Up

Price Range

$2K — $8K

Based on verified secondary market transactions

Last Sold

$4,800

May 6, 2026

Refurbished

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How much does a used Used RF Match Network / Impedance Matching Box cost in 2026?

A used Used RF Match Network / Impedance Matching Box from Various (AE, MKS, Daihen) typically sells for $2k – $8k on the secondary market in 2026. That's a savings of 50-70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Various (AE, MKS, Daihen) Subassemblies vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 50-70% vs. new OEM

✓Lead time: 2-4 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used RF Match Network / Impedance Matching Box from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2-4 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does Used RF Match Network / Impedance Matching Box Cost in 2026?

Used units from AE, MKS, or Daihen range from $2,190–$5,490, while refurbished models with recalibrated components and replaced capacitors cost $5,790–$8,090. New OEM replacements average $15,000–$30,000, offering 62–85% savings over original equipment. Note: Units with >10,000 operational hours typically require capacitor replacement, adding $850–$1,200 to refurbishment costs. Always verify vacuum integrity ratings (min. 1×10⁻⁶ Torr) for plasma stability in high-vacuum chambers.

RF Match Network / Impedance Matching Box Specifications and Compatible Tools

Key specs: 13.56 MHz ±1% frequency stability, 50–500 W power handling, 0–200 V DC bias, and VSWR <1.5:1. Compatible with:

AE 8774E (2008–2015)
MKS 917E (2010–2018)
Daihen RFX-3000 (2012–2020)
Warning: Do not install on Lam CCX-2000 (Part #LAM-CCX-IMB-02) without firmware update #v4.3B; mismatched phase detection causes arcing. Confirm I/O port dimensions (min. 0.5” N-type connectors) before purchase.

What to Check Before Buying a Used RF Match Network / Impedance Matching Box in 2026

Capacitor ESR: Measure equivalent series resistance (ESR <0.05 Ω) with an LCR meter; >0.1 Ω indicates degradation.
Vacuum Seal: Test with a helium mass spectrometer; leaks >1×10⁻⁵ Torr/sec render the unit nonfunctional in plasma chambers.
Phase Shifter Range: Verify 0–360° adjustment using a vector network analyzer (VNA); <340° limits impedance tuning.
Thermal Cycling History: Reject units with >8,000 thermal cycles (check controller logs); relay contact erosion increases failure risk by 40%.
Controller Firmware: Ensure compatibility with your RF generator’s protocol (e.g., IEEE-488 vs. Modbus).

FAQ

Q: Can I use a Daihen RF match network on an AE plasma tool?
A: Yes, if the Daihen unit has N-type I/O ports (AE 8774E requires 0.5” connectors) and firmware is updated to v2.1C for phase alignment.

Q: Used vs. refurbished: which offers better long-term value?
A: Refurbished units with <5,000 operational hours and replaced electrolytic capacitors last 2–3x longer than used parts.

Q: How to test VSWR without a VNA?
A: Use a directional wattmeter to measure forward/reflected power; VSWR = (1 + √(Reflected/Forward)) / (1 - √(Reflected/Forward)).

**Q: What’s the