Used RF Match Network / Impedance Matching Box

Name: Used RF Match Network / Impedance Matching Box
Brand: Various (AE, MKS, Daihen)

Market Price

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Available by Request

Last verified: 2026-05-11

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Used RF Match Network / Impedance Matching Box moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used Used RF Match Network / Impedance Matching Box cost in 2026?

Pricing for used Used RF Match Network / Impedance Matching Box units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Various (AE, MKS, Daihen) Subassemblies vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used RF Match Network / Impedance Matching Box from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

RF Match Network / Impedance Matching Box Specifications and Compatible Tools

Key specs: 13.56 MHz ±1% frequency stability, 50–500 W power handling, 0–200 V DC bias, and VSWR <1.5:1. Compatible with:

AE 8774E (2008–2015)
MKS 917E (2010–2018)
Daihen RFX-3000 (2012–2020)
Warning: Do not install on Lam CCX-2000 (Part #LAM-CCX-IMB-02) without firmware update #v4.3B; mismatched phase detection causes arcing. Confirm I/O port dimensions (min. 0.5” N-type connectors) before purchase.

What to Check Before Buying a Used RF Match Network / Impedance Matching Box in 2026

Capacitor ESR: Measure equivalent series resistance (ESR <0.05 Ω) with an LCR meter; >0.1 Ω indicates degradation.
Vacuum Seal: Test with a helium mass spectrometer; leaks >1×10⁻⁵ Torr/sec render the unit nonfunctional in plasma chambers.
Phase Shifter Range: Verify 0–360° adjustment using a vector network analyzer (VNA); <340° limits impedance tuning.
Thermal Cycling History: Reject units with >8,000 thermal cycles (check controller logs); relay contact erosion increases failure risk by 40%.
Controller Firmware: Ensure compatibility with your RF generator’s protocol (e.g., IEEE-488 vs. Modbus).

FAQ

Q: Can I use a Daihen RF match network on an AE plasma tool?
A: Yes, if the Daihen unit has N-type I/O ports (AE 8774E requires 0.5” connectors) and firmware is updated to v2.1C for phase alignment.

Q: Used vs. refurbished: which offers better long-term value?
A: Refurbished units with <5,000 operational hours and replaced electrolytic capacitors last 2–3x longer than used parts.

Q: How to test VSWR without a VNA?
A: Use a directional wattmeter to measure forward/reflected power; VSWR = (1 + √(Reflected/Forward)) / (1 - √(Reflected/Forward)).