Used SMC Chiller for Semiconductor Equipment

Name: Used SMC Chiller for Semiconductor Equipment
Brand: SMC

Market Price

Request Quote — No current market data

Our sourcing team will find pricing within 4 hours

Request Quote →

Available by Request

Last verified: 2026-05-11

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Used SMC Chiller for Semiconductor Equipment moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used Used SMC Chiller for Semiconductor Equipment cost in 2026?

Pricing for used Used SMC Chiller for Semiconductor Equipment units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used SMC Subassemblies vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used SMC Chiller for Semiconductor Equipment from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

SMC Chiller Specifications and Compatible Tools

Key specs: 5–20 kW cooling capacity, 208–480V AC, 3-phase power, 60 Hz, flow rates of 10–50 L/min, and temperature stability ±0.5°C. Compatible with SMC CPH-5000 (2012–2016), CPH-7000 (2014–2018), and Applied Materials Centura platforms. Warning: Do not install on Lam Research’s FlexLine Series 300mm tools (part #LF-CHL-2023); incompatible with their closed-loop fluidics. Verify SMC’s Model ID sticker for firmware compatibility with target systems.

What to Check Before Buying a Used SMC Chiller in 2026

Leak detection: Use UV dye and blacklight; reject units with >5 drops/hour leakage.
Pump flow rate: Measure with a magnehelic gauge; must hit ≥90% of OEM spec (e.g., 45 L/min min for 50 L/min rated).
Compressor amps: Test with a clamp meter; deviation >5% from nameplate rating indicates wear.
Heat exchanger scaling: Visually inspect for calcium deposits; reject if >20% surface area is fouled.
Service history: Request maintenance logs; units >8 years old without capillary tube replacement risk refrigerant inefficiency.

FAQ

Q: Are used SMC chillers reliable for high-volume production?
A: Yes, if <7 years old with verified maintenance records and no compressor rebuilds.

Q: How to test an SMC chiller’s temperature stability?
A: Use a calibrated thermocouple and step-test the setpoint; stability must hold ±0.3°C over 2 hours.

Q: Used vs. refurbished SMC chiller: which is better?
A: Refurbished units include replaced seals and capacitors, reducing downtime risk. Used units require pre-purchase testing.

Q: Can SMC chillers integrate with non-SMC tools?
A: Yes, but verify fluidic and electrical interfaces. Adapters may be needed for 24V DC control signals.