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Various (Entegris, Empak, Shin-Etsu)

Used Wafer Carrier / Cassette for 200mm or 300mm

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Various (Entegris, Empak, Shin-Etsu)

Used Wafer Carrier / Cassette for 200mm or 300mm

Name: Used Wafer Carrier / Cassette for 200mm or 300mm
Brand: Various (Entegris, Empak, Shin-Etsu)
Price: 812 USD
Availability: InStock

Market Price

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1 active listing

From $812

Typical secondary market pricing · USD

Low $812Avg $812High $812

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Request Quote · $812 – $812

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

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How much does a used Used Wafer Carrier / Cassette for 200mm or 300mm cost in 2026?

A used Used Wafer Carrier / Cassette for 200mm or 300mm from Various (Entegris, Empak, Shin-Etsu) typically sells for $812 – $812 on the secondary market in 2026. That's a savings of 40–70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Various (Entegris, Empak, Shin-Etsu) Subassemblies vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 40–70% vs. new OEM

✓Lead time: 2–6 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used Wafer Carrier / Cassette for 200mm or 300mm from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2–6 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does a Used Wafer Carrier/Cassette Cost in 2026?

Used 200mm/300mm wafer carriers (part numbers vary by OEM) will range from $150 to $800 in 2026, depending on condition and manufacturer. Refurbished units (with OEM-certified seals and coatings) typically cost $300–$1,200, saving 60–75% compared to new models ($2,000–$3,000). Savings drop to 40% for Shin-Etsu SC-220 models due to high demand. Caveat: Carriers with >5 particles/cm² contamination (per SEM analysis) may require costly decontamination, adding $100–$250 to the total. Always verify particle count and wear on load-lock surfaces before purchase.

Wafer Carrier Specifications and Compatible Tools

Key specs: 200mm carriers (305mm height, 220mm width) use PFA/PVDF construction; 300mm models (450mm height) use reinforced PFA. Voltage tolerance: 5–30V (static dissipation). Compatible tools include:

Entegris SureStep 2000 (200mm, 2005–2012)
Empak FC-3000 (300mm, 2008–2015)
Shin-Etsu SC-330 (300mm, 2010–2018)
Exclusion: Avoid using Empak FC-3000 cassettes with ASML NXT:1700 scanners due to clearance conflicts with the tool’s robotic arm (part #NXT-ARM-33). Cross-check tool manuals for mechanical tolerances.

What to Check Before Buying a Used Wafer Carrier in 2026

Scratch depth: Use a profilometer to confirm scratches <50 microns; deeper scratches trap particles.
Contamination: Run a SEM (scanning electron microscope) analysis for particulate density (<5 particles/cm² acceptable).
Dimensional drift: Measure slot spacing with digital calipers; deviation >±0.1mm risks wafer contact.
Material lifecycle: Reject PFA carriers >10 years old (2016 or earlier) due to polymer degradation.
Seal integrity: Pressurize with nitrogen (5 psi) and check for leaks using a soap bubble test. Failing this test indicates compromised vacuum compatibility.