Used Yaskawa Motoman Wafer Handling Robot

Name: Used Yaskawa Motoman Wafer Handling Robot
Brand: Yaskawa Electric (Motoman)

Market Price

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Available by Request

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✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Used Yaskawa Motoman Wafer Handling Robot moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used Used Yaskawa Motoman Wafer Handling Robot cost in 2026?

Pricing for used Used Yaskawa Motoman Wafer Handling Robot units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Yaskawa Electric (Motoman) Subassemblies vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used Yaskawa Motoman Wafer Handling Robot from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

Yaskawa Motoman Wafer Handling Robot Specifications and Compatible Tools

Key specs: 1.2m reach, 5–10kg payload, ±0.01mm repeatability, 220V 3-phase power, 1–5Hz motion frequency. Compatible with:

Applied Materials Centura® 5500 (1998–2005)
Lam Research Etch HDX (2001–2007)
ASMI Group Rapid Thermal Processor models RTPro 8×8 (2003–2010)
Exclusion: Do not install on Tokyo Electron Ltd. TE-S300iC systems (part #TE-ROB-300A) without retrofitting the Y-axis linear guide (original design uses incompatible NSK bearings).

What to Check Before Buying a Used Yaskawa Motoman Wafer Handling Robot in 2026

Joint play inspection: Use a dial gauge to measure wrist axis backlash. Reject if >0.02mm at 50% torque.
Servo motor health: Test insulation resistance with a megohmmeter. Values <10MΩ indicate winding degradation.
End-effector seal integrity: Pressurize vacuum ports to 25kPa; leakage >0.5kPa/min fails contamination standards.
Controller firmware: Units with pre-2009 firmware (versions <V3.2) lack modern error-code diagnostics.
Lubrication history: Check grease fill levels in elbow and shoulder bearings. Re-lube if last serviced >5 years ago.

FAQ

Q: Is Yaskawa Motoman better than ABB for wafer handling?
A: Motoman units excel in sub-10µm repeatability for semiconductor use; ABB robots (e.g., IRB 6600) offer higher payload but less precision for <200mm wafers.

Q: How to verify robot compatibility with my tool?
A: Cross-reference your tool’s part # with the robot’s mounting flange dimensions (Yaskawa spec #MN-FLG-2018) and check I/O pinout diagrams.

Q: Can I retrofit a 2005 Motoman robot with modern servos?
A: Yes, but requires replacing the drive