Used Yaskawa Motoman Wafer Handling Robot

Name: Used Yaskawa Motoman Wafer Handling Robot
Brand: Yaskawa Electric (Motoman)
Price: 11500 USD
Availability: InStock

Market Price

→ Stable

$3K–$20K

Typical secondary market pricing · USD

Low $3,000Avg $11,500High $20,000

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Request Quote · $3K – $20K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

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How much does a used Used Yaskawa Motoman Wafer Handling Robot cost in 2026?

A used Used Yaskawa Motoman Wafer Handling Robot from Yaskawa Electric (Motoman) typically sells for $3k – $20k on the secondary market in 2026. That's a savings of 40–70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Yaskawa Electric (Motoman) Subassemblies vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 40–70% vs. new OEM

✓Lead time: 2–6 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used Yaskawa Motoman Wafer Handling Robot from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2–6 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does Used Yaskawa Motoman Wafer Handling Robot Cost in 2026?

Used units (pre-2018 manufacture) range from $5,500 to $18,000 in 2026, depending on arm configuration and servo motor condition. Refurbished models with updated end-effectors and sealed bearings cost $12,000–$25,000, saving 40–65% vs. new (new base price: $45,000+). Units with original 1990s-era harmonic drives may add $3,000–$5,000 to the base cost due to obsolescence. Note: Robots with >10,000 cumulative operating hours typically require servo motor replacement ($2,500–$4,000), reducing effective savings.

Yaskawa Motoman Wafer Handling Robot Specifications and Compatible Tools

Key specs: 1.2m reach, 5–10kg payload, ±0.01mm repeatability, 220V 3-phase power, 1–5Hz motion frequency. Compatible with:

Applied Materials Centura® 5500 (1998–2005)
Lam Research Etch HDX (2001–2007)
ASMI Group Rapid Thermal Processor models RTPro 8×8 (2003–2010)
Exclusion: Do not install on Tokyo Electron Ltd. TE-S300iC systems (part #TE-ROB-300A) without retrofitting the Y-axis linear guide (original design uses incompatible NSK bearings).

What to Check Before Buying a Used Yaskawa Motoman Wafer Handling Robot in 2026

Joint play inspection: Use a dial gauge to measure wrist axis backlash. Reject if >0.02mm at 50% torque.
Servo motor health: Test insulation resistance with a megohmmeter. Values <10MΩ indicate winding degradation.
End-effector seal integrity: Pressurize vacuum ports to 25kPa; leakage >0.5kPa/min fails contamination standards.
Controller firmware: Units with pre-2009 firmware (versions <V3.2) lack modern error-code diagnostics.
Lubrication history: Check grease fill levels in elbow and shoulder bearings. Re-lube if last serviced >5 years ago.

FAQ

Q: Is Yaskawa Motoman better than ABB for wafer handling?
A: Motoman units excel in sub-10µm repeatability for semiconductor use; ABB robots (e.g., IRB 6600) offer higher payload but less precision for <200mm wafers.

Q: How to verify robot compatibility with my tool?
A: Cross-reference your tool’s part # with the robot’s mounting flange dimensions (Yaskawa spec #MN-FLG-2018) and check I/O pinout diagrams.

Q: Can I retrofit a 2005 Motoman robot with modern servos?
A: Yes, but requires replacing the drive