Used Ion Beam Etch & Sputter Etcher: Buyer Checks
Evaluate a used ion beam etch or sputter etcher: match the process, inspect source hardware and agree sample-based acceptance before purchase.
Shortlisting a used ion beam etch system or sputter etcher? Start by defining the material-removal process you need, then request evidence for the exact tool being offered.
Confirm etching, not deposition
Veeco describes ion beam etching as directing ions at the workpiece to remove material by sputtering. Its ion beam sputtering and deposition systems instead sputter a target to build a film on a substrate.
Ask the seller to identify whether the offered system is configured for etching, deposition or another process. Do not approve a purchase from the word “sputter” in the listing alone. For comparison questions, see the ion beam etch and deposition buying guide.
Match the installed system to your application
Send the seller your substrate dimensions, film stack, mask materials and target profile. Request a configuration sheet covering:
- The tool model, serial number and installed source model.
- Documented beam settings and substrate-stage capabilities for the offered configuration.
- Source, grid and neutralizer maintenance records, where applicable.
- Chamber history, prior process materials and cleaning records.
- Pumping hardware, controls, software access, utilities and included spares.
Veeco identifies beam angle, energy and current as adjustable IBE process variables. Ask for the documented ranges on your candidate rather than copying limits from another model.
Inspect condition without invented wear limits
Request detailed photographs and service records for the source assembly, chamber internals, stage and vacuum hardware. Have a qualified technician compare any wear, deposits or damage with the applicable OEM maintenance criteria.
Ask for pump-down traces, leak-test reports and source-stability data recorded under a stated test setup. Specify the instruments, calibration status and approved limits in the inspection plan; do not substitute a generic pressure number for a leak-rate specification.
Use the used etch equipment inspection guide to organize the review.
Define sample-based acceptance criteria
Have your process engineer define a run on representative samples. Agree the recipe, sampling locations, measurement methods and acceptance limits for:
| Acceptance item | Evidence to request |
|---|---|
| Removal rate and uniformity | Before/after thickness measurements and a sample map |
| Profile and mask performance | Cross-sections or other agreed metrology |
| Surface condition | Inspection against your damage and contamination criteria |
| Repeatability | Results from the agreed sequence of repeat runs |
| Tool operation | Raw process logs, alarms and operator observations |
Write down who witnesses testing, which components are included in the accepted configuration and what happens if the system fails. Use the equipment inspection checklist for the physical handover.
Request an itemized quote
Separate tool price from refurbishment, consumables, decontamination, transport, installation and acceptance support. Require written confirmation of current availability and delivery milestones.
Related Parts
Caladan stocks used and refurbished parts referenced in this article — tested, inspected, and ready to ship.