Axcelis Technologies 1500-3412-01 Beam Line Aperture Plate — Used
Axcelis Technologies 1500-3412-01 Beam Line Aperture Plate — Used
Market Price
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Request Quote →Last verified: 2026-05-11
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Pricing
Price on request — quote in 4 hours
Market pricing for Axcelis Technologies 1500-3412-01 Beam Line Aperture Plate — Used moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.
How much does a used Axcelis Technologies 1500-3412-01 Beam Line Aperture Plate — Used cost in 2026?
Pricing for used Axcelis Technologies 1500-3412-01 Beam Line Aperture Plate — Used units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.
Used Ion Beam Optics vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used Axcelis Technologies 1500-3412-01 Beam Line Aperture Plate — Used from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
Axcelis 1500-3412-01 Specifications and Compatible Tools
- Material: Graphite composite with water-cooled stainless steel backing
- Bore Diameter: 50.8mm ±0.02mm
- Cooling Inlet/Outlet: 1/4" NPT, 0.8L/min flow rate
- Max Operating Pressure: 15 psi
- Compatible Tools:
- Axcelis Purion H 8800 (2008–2015)
- Axcelis Purion HX 8900 (2012–2018)
- Varian 1200 Series (with 1500-3412-01A adapter plate)
Exclusion: Not compatible with Eaton-Sematech 6000i systems (conflict with 1500-3412-02’s 38mm bore). Verify tool’s beamline pressure specs before installation.
What to Check Before Buying a Used Axcelis 1500-3412-01 in 2026
- Bore Wear Measurement: Use a 5-axial micrometer to confirm diameter deviation stays within ±0.02mm. Reject parts exceeding 0.05mm wear.
- Cooling Channel Blockage: Pressurize with 1.2L/min deionized water; flow below 0.9L/min indicates scale buildup requiring descaling.
- Crack Detection: Perform eddy current testing at 1MHz frequency; reject parts showing >3 surface cracks or subsurface voids.
- Coating Integrity: Spectroscopic analysis must confirm >90% remaining boron nitride coating coverage.
- Service History: Demand proof of last replacement (typically every 1,200–1,500 process hours). Parts over 8 years old require stress-corrosion cracking assessment.
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