Advanced Energy RFG 3001 RF Generator (3kW 13.56MHz) for Lam, AMAT, TEL

Name: Advanced Energy RFG 3001 RF Generator (3kW 13.56MHz) for Lam, AMAT, TEL
Brand: Advanced Energy
SKU: RFG 3001
Price: 10920 USD

Part No. RFG 3001

Market Price

→ Stable

7 active listings

$8K–$20K

Typical secondary market pricing · USD

Low $8,450Avg $10,920High $20,000

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Last verified: 2026-05-16

Request Quote · $8K – $20K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Market price (observed)

$8,450 to $20,000

7 listings · last checked Sep 11, 2026 · asking prices, not sold

Source: ebay

Get an exact quote →parts@caladansemi.com

How much does a used Advanced Energy RFG 3001 RF Generator (3kW 13.56MHz) for Lam, AMAT, TEL cost in 2026?

A used Advanced Energy RFG 3001 RF Generator (3kW 13.56MHz) for Lam, AMAT, TEL from Advanced Energy typically sells for $8k – $20k on the secondary market in 2026. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Advanced Energy RF Power vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Advanced Energy RFG 3001 RF Generator (3kW 13.56MHz) for Lam, AMAT, TEL from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

RFG 3001 Specifications and Compatible Tools

Key specs: 3kW peak power, 13.56MHz frequency, 208–480VAC input, 2.5–4.0 GPM cooling flow rate. Compatible with Lam 2300 Centura (2000–2010), AMAT P5000 (2005–2012), and TEL CP-4200 (2008–2015). Verify tool-specific power supply compatibility—units requiring AE PS-3000A will not work with PS-3000B variants due to firmware lockout. Avoid using RFG 3001 in tools designed for 2.5kW generators, as overdrive can trigger plasma instability. Cross-check serial numbers against AE’s 2026 compatibility matrix.