Advanced Energy RFG 3001 RF Generator (3kW 13.56MHz) for Lam, AMAT, TEL

Name: Advanced Energy RFG 3001 RF Generator (3kW 13.56MHz) for Lam, AMAT, TEL
Brand: Advanced Energy
SKU: RFG 3001
Price: 4500 USD
Availability: InStock

Part No. RFG 3001

Market Price

→ Stable

1 active listing

From $5K

Typical secondary market pricing · USD

Low $4,500Avg $4,500High $4,500

Save 40-70% vs OEM new

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Last verified: 2026-05-16

Request Quote · $5K – $5K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Market Data

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How much does a used Advanced Energy RFG 3001 RF Generator (3kW 13.56MHz) for Lam, AMAT, TEL cost in 2026?

A used Advanced Energy RFG 3001 RF Generator (3kW 13.56MHz) for Lam, AMAT, TEL from Advanced Energy typically sells for $5k – $5k on the secondary market in 2026. That's a savings of 40-70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Advanced Energy RF Power vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 40-70% vs. new OEM

✓Lead time: 2-4 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Advanced Energy RFG 3001 RF Generator (3kW 13.56MHz) for Lam, AMAT, TEL from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2-4 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does RFG 3001 Cost in 2026?

In 2026, used RFG 3001 units typically range from $15,000 to $25,000, while refurbished models (with <1,000 operational hours post-service) command $20,000 to $30,000. New OEM units from Advanced Energy list at $50,000+, making used/refurbished options 40–70% cheaper. However, units with >40,000 RF-hours may sell for $10,000–$12,000 below standard used pricing due to higher risk of power module degradation. Price variance depends on cooling system integrity, ESD event history, and availability of original PS-3000 power supplies. Always verify recent transaction data for 2026 market shifts.

RFG 3001 Specifications and Compatible Tools

Key specs: 3kW peak power, 13.56MHz frequency, 208–480VAC input, 2.5–4.0 GPM cooling flow rate. Compatible with Lam 2300 Centura (2000–2010), AMAT P5000 (2005–2012), and TEL CP-4200 (2008–2015). Verify tool-specific power supply compatibility—units requiring AE PS-3000A will not work with PS-3000B variants due to firmware lockout. Avoid using RFG 3001 in tools designed for 2.5kW generators, as overdrive can trigger plasma instability. Cross-check serial numbers against AE’s 2026 compatibility matrix.