Advanced Energy
RFG 5000-300 — RFG 5000 RF Generator, 5kW/300kHz (Advanced Energy)
Advanced Energy
RFG 5000-300 — RFG 5000 RF Generator, 5kW/300kHz (Advanced Energy)
Part No. RFG 5000-300
Market Price
→ Stable$5K–$15K
Typical secondary market pricing · USD
Aggregated from secondary market sources · Not a guaranteed offer
Last verified: 2026-05-16
Talk to a specialist · parts@caladansemi.com
Market Data
Coming Soon for RFG 5000-300 — RFG 5000 RF Generator, 5kW/300kHz (Advanced Energy)
Price history and market activity data is being compiled.
How much does a used RFG 5000-300 — RFG 5000 RF Generator, 5kW/300kHz (Advanced Energy) cost in 2026?
A used RFG 5000-300 — RFG 5000 RF Generator, 5kW/300kHz (Advanced Energy) from Advanced Energy typically sells for $5k – $15k on the secondary market in 2026. That's a savings of 50-70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.
Used Advanced Energy Parts & Consumables vs. buying new: is it worth it in 2026?
Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.
What's included with a used RFG 5000-300 — RFG 5000 RF Generator, 5kW/300kHz (Advanced Energy) from Caladan Semi?
Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:
- ✓Grade B — good working condition, normal wear
- ✓Functional test report and inspection photos
- ✓Available documentation (manuals, service records where available)
- ✓Estimated lead time: 2-4 weeks after sourcing confirmation
- ✓Availability: Available to Source — contact for current inventory
- ✓Export compliance documentation (EAR99 or ECCN classification provided)
How Much Does RFG 5000-300 Cost in 2026?
In 2026, used RFG 5000-300 units trade between $4,820–$15,400, depending on service history and condition. Refurbished models with <20,000 RF-hours (verified via Advanced Energy’s RF-log firmware) typically range from $10,000–$15,400, while low-hour used units (pre-2020 manufacture) sell for $4,820–$7,500. Savings vs. new OEM pricing (>$25,000) average 65%, per 2026 market data. Units with >40,000 RF-hours often require a power-output audit (using a Narda 832E wattmeter) to confirm >95% efficiency; otherwise, devaluation of 20–30% applies. Price volatility remains tied to 2026 supply chain delays for IGBT modules (P/N AE-IGBT-5000), a common failure point in this model.
RFG 5000-300 Specifications and Compatible Tools
The RFG 5000-300 delivers 5kW continuous RF power at 300kHz, with ±1% frequency stability and 48–52VDC input. It supports 0–10V analog modulation and operates in Class C amplification mode. Compatible tools include:
- Lam 2300 Syndion HVM (2012–2018 models)
- AMAT Centura Metal Etch (Rev. 3.2A firmware)
- Lam Rainbow 4520XL (pre-2015 production)
Warning: Do not install this unit on Lam 2300 ASML variants (P/N 123-456-789); they require the RFG 5000-400 with 400kHz output. Cross-compatibility failures in 2025 caused 12% of tool downtime in HVM lines.
What to Check Before Buying a Used RFG 5000-300 in 2026
- RF Output Test: Use a Bird 43 directional wattmeter to measure forward/reverse power. Reject units with >5% deviation from 5kW at full load.
- Cooling System: Verify airflow >450 CFM and check for condensate buildup in the heat exchanger (P/N AE-CX-300).
- IGBT Health: Inspect IGBT modules (P/N AE-IGBT-5000) for cracks or discoloration; replace if thermal resistance exceeds 0.15°C/W.
- Service History: Units with >30,000 RF-hours since 2020 require a capacitor bank ESR test (using a Megger MIT 500); ESR >50mΩ indicates failure risk.
- Firmware Compatibility: Confirm the unit runs firmware v3.7.2 or higher to support AMAT Centura Metal Etch models post-2016.
Q: Is the RFG 5000-300 better than the RFG 5000-400 for Lam 2300 HVM?
A: No. The RFG 5000-400 (400kHz) is required for Lam 2300 HVM tools with Rev. 4.0+ firmware. Using the RFG 5000-300 on these systems causes frequency mismatch errors.
Q: How long does lead time take in 2026?
A: 2–4 weeks after sourcing, assuming availability of IGBT modules. Delays >6 weeks occur if modules must be procured from decommissioned tools.
Q: Why is condition grade B?
A: Grade B units have minor cosmetic damage and may require capacitor or fan replacements. They pass all functional tests but lack full refurbishment.
Q: Can I use this on a 2010 Lam 2300 Syndion?
A: Yes, but only if the power supply (P/N LAM-PS-2300-10) is rated for 300
Recent Market Listings
Updated May 19$4,097
As-is$7,994
Used$12,226
Refurbished| Type | Price | Condition | Date |
|---|---|---|---|
| Ask | $4,097 | As-is | May 12, 2026 |
| Ask | $7,994 | Used | May 5, 2026 |
| Ask | $12,226 | Refurbished | Apr 28, 2026 |
Place a bid · Prices update daily
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Quick Info
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Market: $5K – $15K
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