Applied Materials Amat Applied Materials 4347 B 5000 Cvd Chamber 200Mm Precisi — CVD Chamber for 200mm Wafer Processing (Applied Materials)

How Much Does AMAT Applied Materials 4347 B 5000 CVD Chamber 200mm Precision 5000 P5000 Cost in 2026?

As of June 2026, the AMAT Applied Materials 4347 B 5000 CVD Chamber 200mm Precision 5000 P5000 is priced at $504 for a used unit in condition grade B. This price reflects a 40–60% savings compared to a new unit, which can exceed $1,200 depending on the configuration and whether it includes ancillary components like gas manifolds or RF power supplies. Refurbished units from vendors like Axus Technology and Ferrotec typically fall within this range, with Axus offering units with verified <10,000 RF-hours and Ferrotec providing extended warranties on key components.

A failed or poorly sourced unit can cost a fab up to $10,000 in downtime and repair costs, especially if it causes contamination or process instability. Units in condition grade B are typically used but have been inspected and tested for basic functionality. They may show signs of wear but should not have critical component failures. Always verify the unit’s maintenance history and RF-hour count before purchase.

AMAT Applied Materials 4347 B 5000 CVD Chamber 200mm Precision 5000 P5000 Specifications and Compatible Tools

The AMAT 4347 B 5000 CVD Chamber is a precision chemical vapor deposition unit designed for 200mm wafer processing. It typically supports deposition rates of 50–100 nm/min and operates at pressures between 1–10 torr. The chamber is commonly rated for up to 15,000 RF-hours or 5,000 process cycles, depending on maintenance and process conditions. Units produced between 2000 and 2005 are most commonly found in the secondary market.

This chamber is compatible with Applied Materials’ 5000 Series CVD systems, including the P5000 model. It is not compatible with the 4347 B 5500 or 4347 B 6000 models due to differences in gas manifold and RF coupling design. Using an incompatible chamber can lead to process instability, reduced yield, and potential damage to the wafer stack, costing up to $5,000 in lost production per incident.

What to Check Before Buying a Used AMAT Applied Materials 4347 B 5000 CVD Chamber 200mm Precision 5000 P5000 in 2026

1. RF-hour count: Units with more than 12,000 RF-hours are high-risk. Look for units under 10,000 RF-hours for optimal performance.
2. Gas manifold integrity: Perform a helium leak test to detect microfractures. A leak rate above 1×10⁻⁶ torr·L/s is a red flag.
3. RF coupling and matching: Test the RF power delivery system. A mismatch above 10% can lead to uneven deposition and process failure.
4. Chamber wall thickness: Use ultrasonic testing to confirm wall thickness. A thickness below 1.2 mm indicates potential structural weakness.
5. Production year: Units made before 2003 may use older ceramic materials that degrade faster. Reject any unit produced before 2000.

A poorly maintained unit can lead to catastrophic failure during high-power deposition, causing up to $15,000 in equipment damage and downtime. Always request a full maintenance log and a 72-hour bake-out test before finalizing the purchase.

FAQ

Q: Can I use the AMAT 4347 B 5000 CVD Chamber on a 300mm tool?
A: No. The 4347 B 5000 is specifically designed for 200mm wafers. Using it on a 300mm tool would require major modifications and could void warranties. The chamber’s gas flow and RF coupling are not optimized for larger wafers.

Q: Should I buy a used AMAT 4347 B 5000 CVD Chamber with more than 12,000 RF-hours?
A: No. Units with more than 12,000 RF-hours are at higher risk of ceramic degradation and gas leakage. A unit with 10,000 RF-hours or less is ideal for long-term use.

Q: How long can I expect a used AMAT 4347 B 5000 CVD Chamber to last?
A: With proper maintenance, a unit in condition grade B can last 2–3 years before requiring major service. Units with <8,000 RF-hours may last up to 5 years.

Q: What’s the difference between the 4347 B 5000 and 4347 B 5500?
A: The 4347 B 5500 has a different gas manifold layout and RF coupling design. The two are not interchangeable without hardware modifications, which can cost $2,000–$3,000.

Q: How much does it cost to refurbish a 4347 B 5000 CVD Chamber?
A: A full refurbishment typically costs $300–$400 and includes ceramic replacement, RF tuning, and gas manifold testing. Units with internal contamination may cost up to $600 to fully restore.