Used Brooks Automation Wafer Handling Robot

Name: Used Brooks Automation Wafer Handling Robot
Brand: Brooks Automation

Market Price

Request Quote — No current market data

Our sourcing team will find pricing within 4 hours

Request Quote →

Available by Request

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Used Brooks Automation Wafer Handling Robot moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used Used Brooks Automation Wafer Handling Robot cost in 2026?

Pricing for used Used Brooks Automation Wafer Handling Robot units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Brooks Automation Parts & Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used Brooks Automation Wafer Handling Robot from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

Brooks Automation Wafer Handling Robot Specifications and Compatible Tools

Key specs: 5kg payload, 0.01mm repeatability, 1.5kW power draw, 24V DC servo, 1kHz motion control. Compatible with:

Applied Materials Centura 5500 (2016–2020)
Lam Research Endace XP (2017–2021)
ASMI Group GEMini EFEM (2018–2022)
Tokyo Electron Ltd. Sapphire (2019–2023)
Exclusion: Avoid pairing with Axcelis S系列 (PN: ACX-ROB-300) due to conflicting 48V DC bus requirements. Verify Brooks robot firmware v3.2+ for 2020+ Lam tools.

What to Check Before Buying a Used Brooks Automation Wafer Handling Robot in 2026

Cycle count: Demand logs <200k cycles; >250k risks servo gear wear. Use Brooks diagnostic tool (PN: BRS-DIAG-2024) to verify.
Servo motor resistance: Measure phase-to-phase with multimeter; <0.5Ω imbalance indicates insulation degradation.
End-effector alignment: Check parallelism with laser interferometer; >5µm deviation requires recalibration.
Controller firmware: v3.2+ required for 2020+ tools; v2.8–v3.1 lacks 300mm wafer vibration dampening.
Contamination: Inspect for flux residue in Z-axis bearings; reject if corrosion is visible on 2018–2019 models (known batch defect).

FAQ

Q: Is a 2019 Brooks SCARA robot compatible with a 2024 Lam tool?
A: Yes, if upgraded to firmware v3.3 and fitted with 12V DC servo amplifiers (PN: BRS-AMP-12V-2).

Q: Used vs refurbished Brooks robot – what’s the difference?
A: Used units are minimally cleaned; refurbished includes motor rebuilds, full calibration, and 1-year warranty.

Q: How to test a Brooks robot’s repeatability?
A: Run ISO 9283 Type C test with laser tracker; 0.01mm spec must hold across 100 consecutive cycles.

Q: Can I use a Brooks dual-arm robot in a 200mm-only fab?
A: Yes, but confirm payload capacity matches 200mm cassette weight (max 3.2kg loaded).