Used Brooks Automation Wafer Handling Robot

Name: Used Brooks Automation Wafer Handling Robot
Brand: Brooks Automation
Price: 14000 USD
Availability: InStock

Market Price

→ Stable

$3K–$25K

Typical secondary market pricing · USD

Low $3,000Avg $14,000High $25,000

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Request Quote · $3K – $25K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

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How much does a used Used Brooks Automation Wafer Handling Robot cost in 2026?

A used Used Brooks Automation Wafer Handling Robot from Brooks Automation typically sells for $3k – $25k on the secondary market in 2026. That's a savings of 40–70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Brooks Automation Parts & Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 40–70% vs. new OEM

✓Lead time: 2–6 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used Brooks Automation Wafer Handling Robot from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2–6 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does Used Brooks Automation Wafer Handling Robot Cost in 2026?

Used models (2018–2022 vintage) range from $45,000 to $85,000, depending on payload capacity and servo motor condition. Refurbished units with <150k cycles and original Brooks end-effectors average $65,000–$75,000, saving 65–70% vs new ($210,000+ MSRP). Units with >200k cycles or third-party grippers drop to $35,000–$50,000 but require motor rebuilds. Note: 2019–2021 models with 12V DC servo amplifiers (PN: BRS-AMP-12V-2) are incompatible with 2023+ tooling without firmware upgrades.

Brooks Automation Wafer Handling Robot Specifications and Compatible Tools

Key specs: 5kg payload, 0.01mm repeatability, 1.5kW power draw, 24V DC servo, 1kHz motion control. Compatible with:

Applied Materials Centura 5500 (2016–2020)
Lam Research Endace XP (2017–2021)
ASMI Group GEMini EFEM (2018–2022)
Tokyo Electron Ltd. Sapphire (2019–2023)
Exclusion: Avoid pairing with Axcelis S系列 (PN: ACX-ROB-300) due to conflicting 48V DC bus requirements. Verify Brooks robot firmware v3.2+ for 2020+ Lam tools.

What to Check Before Buying a Used Brooks Automation Wafer Handling Robot in 2026

Cycle count: Demand logs <200k cycles; >250k risks servo gear wear. Use Brooks diagnostic tool (PN: BRS-DIAG-2024) to verify.
Servo motor resistance: Measure phase-to-phase with multimeter; <0.5Ω imbalance indicates insulation degradation.
End-effector alignment: Check parallelism with laser interferometer; >5µm deviation requires recalibration.
Controller firmware: v3.2+ required for 2020+ tools; v2.8–v3.1 lacks 300mm wafer vibration dampening.
Contamination: Inspect for flux residue in Z-axis bearings; reject if corrosion is visible on 2018–2019 models (known batch defect).

FAQ

Q: Is a 2019 Brooks SCARA robot compatible with a 2024 Lam tool?
A: Yes, if upgraded to firmware v3.3 and fitted with 12V DC servo amplifiers (PN: BRS-AMP-12V-2).

Q: Used vs refurbished Brooks robot – what’s the difference?
A: Used units are minimally cleaned; refurbished includes motor rebuilds, full calibration, and 1-year warranty.

Q: How to test a Brooks robot’s repeatability?
A: Run ISO 9283 Type C test with laser tracker; 0.01mm spec must hold across 100 consecutive cycles.

Q: Can I use a Brooks dual-arm robot in a 200mm-only fab?
A: Yes, but confirm payload capacity matches 200mm cassette weight (max 3.2kg loaded).