Brooks Reliance Atmospheric Wafer Robot

Name: Brooks Reliance Atmospheric Wafer Robot
Brand: Brooks Automation

Market Price

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Available by Request

Last verified: 2026-05-11

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Brooks Reliance Atmospheric Wafer Robot moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used Brooks Reliance Atmospheric Wafer Robot cost in 2026?

Pricing for used Brooks Reliance Atmospheric Wafer Robot units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Brooks Automation Subassemblies vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Brooks Reliance Atmospheric Wafer Robot from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

Brooks Reliance Atmospheric Wafer Robot Specifications and Compatible Tools

Key specs: 300mm wafer payload, 850mm radial reach, ±0.5µm repeatability, 220VAC 3-phase power, 1.2kW peak draw. Compatible with:

Applied Materials Centura (1998–2005)
Lam Research Etch Pro (2000–2007)
Tokyo Electron LoadLock (2002–2009)
Exclusion: Not compatible with Axcelis 3200 Series (part #AX-ROB-21A) due to conflicting 19" vs 23" arm interface standards. Verify tool’s original robot model number (e.g., BRS-REL-300A) before purchase.

What to Check Before Buying a Used Brooks Reliance Atmospheric Wafer Robot in 2026

Maintenance logs: Reject units without records of vacuum seal replacements in last 3 years.
Linear guide wear: Use a dial gauge; >0.02mm play in X/Y axes indicates binding risk.
Motor torque test: Run a dynamometer stress test at 150% rated load for 30 mins; derate if thermal shutdown occurs.
Corrosion inspection: Check end-effector joints for salt residue (common in coastal fab environments