Brooks Reliance Atmospheric Wafer Robot

Name: Brooks Reliance Atmospheric Wafer Robot
Brand: Brooks Automation
Price: 18180 USD
Availability: InStock

Market Price

→ Stable

$11K–$25K

Typical secondary market pricing · USD

Low $11,210Avg $18,180High $25,150

Save 50-70% vs OEM new

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Last verified: 2026-05-11

Request Quote · $11K – $25K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Market Data

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How much does a used Brooks Reliance Atmospheric Wafer Robot cost in 2026?

A used Brooks Reliance Atmospheric Wafer Robot from Brooks Automation typically sells for $11k – $25k on the secondary market in 2026. That's a savings of 50-70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Brooks Automation Subassemblies vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 50-70% vs. new OEM

✓Lead time: 2-4 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Brooks Reliance Atmospheric Wafer Robot from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2-4 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does Brooks Reliance Atmospheric Wafer Robot Cost in 2026?

Used units range from $11,210–$25,150 in 2026, with refurbished models clustering near $18,000. Refurbished parts save ~32–47% vs new OEM pricing (estimated $28k–$35k). Used prices vary by tool origin: robots from Applied Materials tools (2000–2005) command 15–20% premiums due to higher demand. Caveat: Units with >12,000 cumulative wafer transfers since last overhaul show 2.1x higher failure rates in field tests. Always verify maintenance logs for vacuum seal replacements and motor recalibrations.

Brooks Reliance Atmospheric Wafer Robot Specifications and Compatible Tools

Key specs: 300mm wafer payload, 850mm radial reach, ±0.5µm repeatability, 220VAC 3-phase power, 1.2kW peak draw. Compatible with:

Applied Materials Centura (1998–2005)
Lam Research Etch Pro (2000–2007)
Tokyo Electron LoadLock (2002–2009)
Exclusion: Not compatible with Axcelis 3200 Series (part #AX-ROB-21A) due to conflicting 19" vs 23" arm interface standards. Verify tool’s original robot model number (e.g., BRS-REL-300A) before purchase.

What to Check Before Buying a Used Brooks Reliance Atmospheric Wafer Robot in 2026

Maintenance logs: Reject units without records of vacuum seal replacements in last 3 years.
Linear guide wear: Use a dial gauge; >0.02mm play in X/Y axes indicates binding risk.
Motor torque test: Run a dynamometer stress test at 150% rated load for 30 mins; derate if thermal shutdown occurs.
Corrosion inspection: Check end-effector joints for salt residue (common in coastal fab environments