Used Brooks LPS-3000 Loadport System

Name: Used Brooks LPS-3000 Loadport System
Brand: Brooks Automation
Price: 8500 USD
Availability: InStock

Market Price

→ Stable

$2K–$15K

Typical secondary market pricing · USD

Low $2,000Avg $8,500High $15,000

Aggregated from secondary market sources · Not a guaranteed offer

Available by Request

Request Quote · $2K – $15K

Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Market Data

Coming Soon for Used Brooks LPS-3000 Loadport System

Price history and market activity data is being compiled.

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How much does a used Used Brooks LPS-3000 Loadport System cost in 2026?

A used Used Brooks LPS-3000 Loadport System from Brooks Automation typically sells for $2k – $15k on the secondary market in 2026. That's a savings of 40–70% compared to new OEM pricing. Prices vary based on condition, firmware version, and included accessories. Request a quote for current availability.

Used Brooks Automation Parts & Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Save 40–70% vs. new OEM

✓Lead time: 2–6 weeks

✓Condition: B grade

✓30-day functional warranty

New OEM

—Full OEM price (1–2.5× used)

—Lead times: 12–52 weeks

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used Brooks LPS-3000 Loadport System from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Grade B — good working condition, normal wear
✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Estimated lead time: 2–6 weeks after sourcing confirmation
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

How Much Does Brooks LPS-3000 Loadport System Cost in 2026?

Used units typically range from $15,000 to $25,000, while refurbished models with updated firmware and seals fall between $20,000 to $30,000. These prices represent 40–60% savings versus new OEM pricing (which exceeds $60,000). Note: Units with door actuators exceeding 50,000 cycles (trackable via Brooks’ LPS-LOG utility) may add $2,000–$5,000 to the base cost due to wear on linear bearings. Market demand for 300mm-compatible variants remains 20% higher than 200mm versions, affecting lead times.

Brooks LPS-3000 Specifications and Compatible Tools

Key specs: 230V AC, 3-phase power; 0.1–0.8 MPa vacuum capability; 1.5 kW motor; 10–15 Nm torque for pod clamping. Compatible with:

Applied Materials Centura platforms (1998–2005)
Lam Research Endura P5000 (2000–2006)
ASML NXT:1700 (2004–2008) with 300mm FOUPs
Exclusion: TSMC’s NT3000 cluster tools (part number 789-5632) require a modified LPS-3000 variant with dual SMIF interfaces—standard models will fail tool certification. Verify tool’s SEMI E157 compliance level before purchase.

What to Check Before Buying a Used Brooks LPS-3000 Loadport System in 2026

Door actuator cycle count: Use Brooks’ LPS-LOG diagnostic tool; reject units >80,000 cycles (bearing wear increases by 15% per 10,000 cycles beyond 50k).
Vacuum seal integrity: Test with a helium mass spectrometer; leaks >1×10⁻⁶ mbar·L/s require seal replacement.
Motor winding resistance: Measure with a megohmmeter; <10 MΩ insulation resistance indicates moisture damage.
Corrosion in base frame: Visually inspect for pitting near vacuum ports; reject if >2mm depth (per SEMI F29-0700 standards).
Firmware version: Systems with pre-2010 software lack 300mm FOUP collision-detection updates—request retrofit kit (avg. $1,200).

FAQ

Q: Does the LPS-3000 support 200mm SMIF pods?
A: Yes, but requires manual configuration via the LPS-CONFIG utility. 300mm FOUP compatibility is default.

**Q: LPS-3000 vs. LPS-4000: which is better for high-throughput?