Used Brooks LPS-3000 Loadport System

Name: Used Brooks LPS-3000 Loadport System
Brand: Brooks Automation

Market Price

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Available by Request

Selling this part? Place an ask · Talk to a specialist · parts@caladansemi.com

✓Tested & inspected

✓Documentation included

✓Fast worldwide shipping

✓30-day functional warranty

✓Escrow payment available

Pricing

Price on request — quote in 4 hours

Market pricing for Used Brooks LPS-3000 Loadport System moves with condition and availability. Our sourcing team will quote current pricing within 4 business hours.

Get an exact quote →parts@caladansemi.com

How much does a used Used Brooks LPS-3000 Loadport System cost in 2026?

Pricing for used Used Brooks LPS-3000 Loadport System units varies by condition and configuration. Contact us for current 2026 market pricing. Get a quote.

Used Brooks Automation Parts & Consumables vs. buying new: is it worth it in 2026?

Used (2026)

✓Priced below new OEM

✓Inspected and functionally tested before shipment

✓30-day functional warranty

New OEM

—Full OEM list price

—Factory lead times apply

—New condition, full warranty

—Factory support included

Most buyers in 2026 choose used for cost and speed. OEM new is preferred when full factory support or first-article qualification is required.

What's included with a used Used Brooks LPS-3000 Loadport System from Caladan Semi?

Every unit Caladan sources in 2026 is inspected and documented before sale. Here's what you get:

✓Functional test report and inspection photos
✓Available documentation (manuals, service records where available)
✓Availability: Available to Source — contact for current inventory
✓Export compliance documentation (EAR99 or ECCN classification provided)

Brooks LPS-3000 Specifications and Compatible Tools

Key specs: 230V AC, 3-phase power; 0.1–0.8 MPa vacuum capability; 1.5 kW motor; 10–15 Nm torque for pod clamping. Compatible with:

Applied Materials Centura platforms (1998–2005)
Lam Research Endura P5000 (2000–2006)
ASML NXT:1700 (2004–2008) with 300mm FOUPs
Exclusion: TSMC’s NT3000 cluster tools (part number 789-5632) require a modified LPS-3000 variant with dual SMIF interfaces—standard models will fail tool certification. Verify tool’s SEMI E157 compliance level before purchase.

What to Check Before Buying a Used Brooks LPS-3000 Loadport System in 2026

Door actuator cycle count: Use Brooks’ LPS-LOG diagnostic tool; reject units >80,000 cycles (bearing wear increases by 15% per 10,000 cycles beyond 50k).
Vacuum seal integrity: Test with a helium mass spectrometer; leaks >1×10⁻⁶ mbar·L/s require seal replacement.
Motor winding resistance: Measure with a megohmmeter; <10 MΩ insulation resistance indicates moisture damage.
Corrosion in base frame: Visually inspect for pitting near vacuum ports; reject if >2mm depth (per SEMI F29-0700 standards).

FAQ

Q: Does the LPS-3000 support 200mm SMIF pods?
A: Yes, but requires manual configuration via the LPS-CONFIG utility. 300mm FOUP compatibility is default.